Abstract
A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
Original language | English |
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Title of host publication | International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings |
Publisher | IEEE Computer Society |
Volume | 2018-July |
ISBN (Print) | 9781509063727 |
DOIs | |
Publication status | Published - 2018 Sep 4 |
Event | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2 |
Other
Other | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 |
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Country | Switzerland |
City | Lausanne |
Period | 18/7/29 → 18/8/2 |
Keywords
- Diffusion sensor
- Electrothermal actuation
- Interfrlometric
- MEMS mirror
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials