Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
Volume2018-July
ISBN (Print)9781509063727
DOIs
Publication statusPublished - 2018 Sep 4
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 2018 Jul 292018 Aug 2

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period18/7/2918/8/2

Fingerprint

Mirrors
Volume measurement
Sensors
MEMS
Actuators

Keywords

  • Diffusion sensor
  • Electrothermal actuation
  • Interfrlometric
  • MEMS mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Nakagawa, T., Taguchi, Y., & Nagasaka, Y. (2018). Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings (Vol. 2018-July). [8454604] IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454604

Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. / Nakagawa, Takuya; Taguchi, Yoshihiro; Nagasaka, Yuji.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018. 8454604.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakagawa, T, Taguchi, Y & Nagasaka, Y 2018, Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. vol. 2018-July, 8454604, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18/7/29. https://doi.org/10.1109/OMN.2018.8454604
Nakagawa T, Taguchi Y, Nagasaka Y. Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July. IEEE Computer Society. 2018. 8454604 https://doi.org/10.1109/OMN.2018.8454604
Nakagawa, Takuya ; Taguchi, Yoshihiro ; Nagasaka, Yuji. / Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018.
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