Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Takuya Nakagawa; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2018.8454604

Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Takuya Nakagawa, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
Volume	2018-July
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454604
Publication status	Published - 2018 Sep 4
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2

Other

Other	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country	Switzerland
City	Lausanne
Period	18/7/29 → 18/8/2

Keywords

Diffusion sensor
Electrothermal actuation
Interfrlometric
MEMS mirror

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2018.8454604

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Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. / Nakagawa, Takuya; Taguchi, Yoshihiro; Nagasaka, Yuji.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018. 8454604.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakagawa, T, Taguchi, Y & Nagasaka, Y 2018, Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. vol. 2018-July, 8454604, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18/7/29. https://doi.org/10.1109/OMN.2018.8454604

@inproceedings{0df695d8dc5343e0bd3bf054dd926111,

title = "Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform",

abstract = "A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.",

keywords = "Diffusion sensor, Electrothermal actuation, Interfrlometric, MEMS mirror",

author = "Takuya Nakagawa and Yoshihiro Taguchi and Yuji Nagasaka",

year = "2018",

month = sep,

day = "4",

doi = "10.1109/OMN.2018.8454604",

language = "English",

isbn = "9781509063727",

volume = "2018-July",

booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",

publisher = "IEEE Computer Society",

note = "23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",

}

TY - GEN

T1 - Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

AU - Nakagawa, Takuya

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2018/9/4

Y1 - 2018/9/4

N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

KW - Diffusion sensor

KW - Electrothermal actuation

KW - Interfrlometric

KW - MEMS mirror

UR - http://www.scopus.com/inward/record.url?scp=85053917077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053917077&partnerID=8YFLogxK

U2 - 10.1109/OMN.2018.8454604

DO - 10.1109/OMN.2018.8454604

M3 - Conference contribution

AN - SCOPUS:85053917077

SN - 9781509063727

VL - 2018-July

BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings

PB - IEEE Computer Society

T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018

Y2 - 29 July 2018 through 2 August 2018

ER -