Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Takuya Nakagawa; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2018.8454604

Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Takuya Nakagawa, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
Volume	2018-July
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454604
Publication status	Published - 2018 Sep 4
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2

Other

Other	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country	Switzerland
City	Lausanne
Period	18/7/29 → 18/8/2

Fingerprint

Keywords

Diffusion sensor
Electrothermal actuation
Interfrlometric
MEMS mirror

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Cite this

Nakagawa, T., Taguchi, Y., & Nagasaka, Y. (2018). Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings (Vol. 2018-July). [8454604] IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454604

Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. / Nakagawa, Takuya; Taguchi, Yoshihiro ; Nagasaka, Yuji.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018. 8454604.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakagawa, T, Taguchi, Y & Nagasaka, Y 2018, Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. vol. 2018-July, 8454604, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18/7/29. https://doi.org/10.1109/OMN.2018.8454604

@inproceedings{0df695d8dc5343e0bd3bf054dd926111,

title = "Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform",

abstract = "A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.",

keywords = "Diffusion sensor, Electrothermal actuation, Interfrlometric, MEMS mirror",

author = "Takuya Nakagawa and Yoshihiro Taguchi and Yuji Nagasaka",

year = "2018",

month = "9",

day = "4",

doi = "10.1109/OMN.2018.8454604",

language = "English",

isbn = "9781509063727",

volume = "2018-July",

booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",

publisher = "IEEE Computer Society",

note = "23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",

}

TY - GEN

T1 - Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

AU - Nakagawa, Takuya

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2018/9/4

Y1 - 2018/9/4

N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

KW - Diffusion sensor

KW - Electrothermal actuation

KW - Interfrlometric

KW - MEMS mirror

UR - http://www.scopus.com/inward/record.url?scp=85053917077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053917077&partnerID=8YFLogxK

U2 - 10.1109/OMN.2018.8454604

DO - 10.1109/OMN.2018.8454604

M3 - Conference contribution

AN - SCOPUS:85053917077

SN - 9781509063727

VL - 2018-July

BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings

PB - IEEE Computer Society

T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018

Y2 - 29 July 2018 through 2 August 2018

ER -

Access to Document

10.1109/OMN.2018.8454604