Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
Volume2018-July
ISBN (Print)9781509063727
DOIs
Publication statusPublished - 2018 Sep 4
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 2018 Jul 292018 Aug 2

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period18/7/2918/8/2

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Keywords

  • Diffusion sensor
  • Electrothermal actuation
  • Interfrlometric
  • MEMS mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Nakagawa, T., Taguchi, Y., & Nagasaka, Y. (2018). Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings (Vol. 2018-July). [8454604] IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454604