Abstract
A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings |
| Publisher | IEEE Computer Society |
| Volume | 2018-July |
| ISBN (Print) | 9781509063727 |
| DOIs | |
| Publication status | Published - 2018 Sep 4 |
| Event | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2 |
Other
| Other | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 |
|---|---|
| Country | Switzerland |
| City | Lausanne |
| Period | 18/7/29 → 18/8/2 |
Keywords
- Diffusion sensor
- Electrothermal actuation
- Interfrlometric
- MEMS mirror
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
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Nakagawa, T., Taguchi, Y., & Nagasaka, Y. (2018). Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings (Vol. 2018-July). [8454604] IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454604