Abstract
A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings |
| Publisher | IEEE Computer Society |
| Volume | 2018-July |
| ISBN (Print) | 9781509063727 |
| DOIs | |
| Publication status | Published - 2018 Sep 4 |
| Event | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2 |
Other
| Other | 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 |
|---|---|
| Country | Switzerland |
| City | Lausanne |
| Period | 18/7/29 → 18/8/2 |
Fingerprint
Keywords
- Diffusion sensor
- Electrothermal actuation
- Interfrlometric
- MEMS mirror
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform. / Nakagawa, Takuya; Taguchi, Yoshihiro; Nagasaka, Yuji.
International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018. 8454604.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform
AU - Nakagawa, Takuya
AU - Taguchi, Yoshihiro
AU - Nagasaka, Yuji
PY - 2018/9/4
Y1 - 2018/9/4
N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.
KW - Diffusion sensor
KW - Electrothermal actuation
KW - Interfrlometric
KW - MEMS mirror
UR - http://www.scopus.com/inward/record.url?scp=85053917077&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85053917077&partnerID=8YFLogxK
U2 - 10.1109/OMN.2018.8454604
DO - 10.1109/OMN.2018.8454604
M3 - Conference contribution
AN - SCOPUS:85053917077
SN - 9781509063727
VL - 2018-July
BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PB - IEEE Computer Society
ER -