Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi, Yoshihiro Taguchi, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

Original languageEnglish
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
Publication statusPublished - 2015 Oct 2
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2015 Aug 22015 Aug 5

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

OtherInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/TerritoryIsrael
CityJerusalem
Period15/8/215/8/5

Keywords

  • Deformation
  • Electrothermal actuation
  • MEMS mirror
  • Thermal expansion

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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