Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2015.7288894

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics
Publisher	IEEE Computer Society
Volume	02-05-August-2015
ISBN (Print)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288894
Publication status	Published - 2015 Oct 2
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2015 Aug 2 → 2015 Aug 5

Other

Other	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country	Israel
City	Jerusalem
Period	15/8/2 → 15/8/5

Keywords

Deformation
Electrothermal actuation
MEMS mirror
Thermal expansion

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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Kiuchi, Y, Taguchi, Y & Nagasaka, Y 2015, Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. in International Conference on Optical MEMS and Nanophotonics. vol. 02-05-August-2015, 7288894, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 15/8/2. https://doi.org/10.1109/OMN.2015.7288894

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title = "Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor",

abstract = "A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.",

keywords = "Deformation, Electrothermal actuation, MEMS mirror, Thermal expansion",

author = "Yuki Kiuchi and Yoshihiro Taguchi and Yuji Nagasaka",

year = "2015",

month = oct,

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doi = "10.1109/OMN.2015.7288894",

language = "English",

isbn = "9781467368346",

volume = "02-05-August-2015",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

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T1 - Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

AU - Kiuchi, Yuki

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2015/10/2

Y1 - 2015/10/2

N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

KW - Deformation

KW - Electrothermal actuation

KW - MEMS mirror

KW - Thermal expansion

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U2 - 10.1109/OMN.2015.7288894

DO - 10.1109/OMN.2015.7288894

M3 - Conference contribution

AN - SCOPUS:84958581108

SN - 9781467368346

VL - 02-05-August-2015

BT - International Conference on Optical MEMS and Nanophotonics

PB - IEEE Computer Society

T2 - International Conference on Optical MEMS and Nanophotonics, OMN 2015

Y2 - 2 August 2015 through 5 August 2015

ER -

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Abstract

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Keywords

ASJC Scopus subject areas

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