Abstract
A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Optical MEMS and Nanophotonics |
| Publisher | IEEE Computer Society |
| Volume | 02-05-August-2015 |
| ISBN (Print) | 9781467368346 |
| DOIs | |
| Publication status | Published - 2015 Oct 2 |
| Event | International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2015 Aug 2 → 2015 Aug 5 |
Other
| Other | International Conference on Optical MEMS and Nanophotonics, OMN 2015 |
|---|---|
| Country | Israel |
| City | Jerusalem |
| Period | 15/8/2 → 15/8/5 |
Keywords
- Deformation
- Electrothermal actuation
- MEMS mirror
- Thermal expansion
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
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Cite this
Kiuchi, Y., Taguchi, Y., & Nagasaka, Y. (2015). Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. In International Conference on Optical MEMS and Nanophotonics (Vol. 02-05-August-2015). [7288894] IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288894