Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2015.7288894

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics
Publisher	IEEE Computer Society
Volume	02-05-August-2015
ISBN (Print)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288894
Publication status	Published - 2015 Oct 2
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2015 Aug 2 → 2015 Aug 5

Other

Other	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country	Israel
City	Jerusalem
Period	15/8/2 → 15/8/5

Keywords

Deformation
Electrothermal actuation
MEMS mirror
Thermal expansion

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2015.7288894

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Cite this

Kiuchi, Y, Taguchi, Y & Nagasaka, Y 2015, Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. in International Conference on Optical MEMS and Nanophotonics. vol. 02-05-August-2015, 7288894, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 15/8/2. https://doi.org/10.1109/OMN.2015.7288894

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title = "Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor",

abstract = "A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.",

keywords = "Deformation, Electrothermal actuation, MEMS mirror, Thermal expansion",

author = "Yuki Kiuchi and Yoshihiro Taguchi and Yuji Nagasaka",

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AU - Nagasaka, Yuji

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N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

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KW - Thermal expansion

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