TY - GEN
T1 - Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor
AU - Kiuchi, Yuki
AU - Taguchi, Yoshihiro
AU - Nagasaka, Yuji
N1 - Funding Information:
This research was partially supported by the academic consortium for nano and micro fabrication of four universities (Keio university, Waseda university, Tokyo institute of technology, and the University of Tokyo).
Publisher Copyright:
© 2015 IEEE.
PY - 2015/10/2
Y1 - 2015/10/2
N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.
AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.
KW - Deformation
KW - Electrothermal actuation
KW - MEMS mirror
KW - Thermal expansion
UR - http://www.scopus.com/inward/record.url?scp=84958581108&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84958581108&partnerID=8YFLogxK
U2 - 10.1109/OMN.2015.7288894
DO - 10.1109/OMN.2015.7288894
M3 - Conference contribution
AN - SCOPUS:84958581108
T3 - International Conference on Optical MEMS and Nanophotonics
BT - OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PB - IEEE Computer Society
T2 - International Conference on Optical MEMS and Nanophotonics, OMN 2015
Y2 - 2 August 2015 through 5 August 2015
ER -