Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics
PublisherIEEE Computer Society
Volume02-05-August-2015
ISBN (Print)9781467368346
DOIs
Publication statusPublished - 2015 Oct 2
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2015 Aug 22015 Aug 5

Other

OtherInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
CountryIsrael
CityJerusalem
Period15/8/215/8/5

Fingerprint

Volume measurement
MEMS
Mirrors
Sensors
Electric potential

Keywords

  • Deformation
  • Electrothermal actuation
  • MEMS mirror
  • Thermal expansion

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Kiuchi, Y., Taguchi, Y., & Nagasaka, Y. (2015). Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. In International Conference on Optical MEMS and Nanophotonics (Vol. 02-05-August-2015). [7288894] IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288894

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. / Kiuchi, Yuki; Taguchi, Yoshihiro; Nagasaka, Yuji.

International Conference on Optical MEMS and Nanophotonics. Vol. 02-05-August-2015 IEEE Computer Society, 2015. 7288894.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kiuchi, Y, Taguchi, Y & Nagasaka, Y 2015, Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. in International Conference on Optical MEMS and Nanophotonics. vol. 02-05-August-2015, 7288894, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 15/8/2. https://doi.org/10.1109/OMN.2015.7288894
Kiuchi Y, Taguchi Y, Nagasaka Y. Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. In International Conference on Optical MEMS and Nanophotonics. Vol. 02-05-August-2015. IEEE Computer Society. 2015. 7288894 https://doi.org/10.1109/OMN.2015.7288894
Kiuchi, Yuki ; Taguchi, Yoshihiro ; Nagasaka, Yuji. / Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. International Conference on Optical MEMS and Nanophotonics. Vol. 02-05-August-2015 IEEE Computer Society, 2015.
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