Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2015.7288894

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Yuki Kiuchi, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

Original language	English
Title of host publication	OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288894
Publication status	Published - 2015 Oct 2
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2015 Aug 2 → 2015 Aug 5

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	02-05-August-2015
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/Territory	Israel
City	Jerusalem
Period	15/8/2 → 15/8/5

Keywords

Deformation
Electrothermal actuation
MEMS mirror
Thermal expansion

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2015.7288894

Cite this

Kiuchi, Y., Taguchi, Y., & Nagasaka, Y. (2015). Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings [7288894] (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288894

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. / Kiuchi, Yuki; Taguchi, Yoshihiro; Nagasaka, Yuji.

OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society, 2015. 7288894 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kiuchi, Y, Taguchi, Y & Nagasaka, Y 2015, Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor. in OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings., 7288894, International Conference on Optical MEMS and Nanophotonics, vol. 02-05-August-2015, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 15/8/2. https://doi.org/10.1109/OMN.2015.7288894

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title = "Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor",

abstract = "A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.",

keywords = "Deformation, Electrothermal actuation, MEMS mirror, Thermal expansion",

author = "Yuki Kiuchi and Yoshihiro Taguchi and Yuji Nagasaka",

note = "Funding Information: This research was partially supported by the academic consortium for nano and micro fabrication of four universities (Keio university, Waseda university, Tokyo institute of technology, and the University of Tokyo). Publisher Copyright: {\textcopyright} 2015 IEEE.; International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",

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doi = "10.1109/OMN.2015.7288894",

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AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

N1 - Funding Information: This research was partially supported by the academic consortium for nano and micro fabrication of four universities (Keio university, Waseda university, Tokyo institute of technology, and the University of Tokyo). Publisher Copyright: © 2015 IEEE.

PY - 2015/10/2

Y1 - 2015/10/2

N2 - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

AB - A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. In this paper, a device design and a validity of an electrothermal MEMS mirror are reported.

KW - Deformation

KW - Electrothermal actuation

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KW - Thermal expansion

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Y2 - 2 August 2015 through 5 August 2015

ER -

Development of electrothermal MEMS mirror for low voltage micro optical diffusion sensor

Abstract

Publication series

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Keywords

ASJC Scopus subject areas

Access to Document

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