Development of fixture devices for thin and compliant workpieces

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

Fixturing of thin and compliant workpieces is in many ways technically more demanding than fixturing of stiff workpieces. Nowadays, thin and compliant workpieces, e.g., electrical parts containing semiconductor substrates must be supported with uniform contact force in order to assure high positioning accuracy. In particular, workpiece supporters must suppress workpiece deformation during machining. This study presents new fixture devices that can support thin and compliant workpieces securely and minimize the deformation due to the machining force. A low melting temperature alloy was used in the support structure to fulfill the required functions with simple structure.

Original languageEnglish
Pages (from-to)325-328
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume54
Issue number1
Publication statusPublished - 2005

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Machining
Melting point
Semiconductor materials
Substrates

Keywords

  • Fixture
  • Support
  • Workpiece

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Development of fixture devices for thin and compliant workpieces. / Aoyama, Tojiro; Kakinuma, Yasuhiro.

In: CIRP Annals - Manufacturing Technology, Vol. 54, No. 1, 2005, p. 325-328.

Research output: Contribution to journalArticle

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