Development of high-flux ion source for size-selected nanocluster ions based on high-power impulse magnetron sputtering

Hironori Tsunoyama, Chuhang Zhang, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensity in the present method was achieved by the high throughput of the ion optics and the high ionization fraction. Fine tuning of the nanocluster size distributions was also demonstrated.

Original languageEnglish
Pages (from-to)857-859
Number of pages3
JournalChemistry Letters
Volume42
Issue number8
DOIs
Publication statusPublished - 2013

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Nanoclusters
Ion sources
Magnetron sputtering
Ions
Fluxes
Silver
Ionization
Anions
Optics
Tuning
Throughput

ASJC Scopus subject areas

  • Chemistry(all)

Cite this

Development of high-flux ion source for size-selected nanocluster ions based on high-power impulse magnetron sputtering. / Tsunoyama, Hironori; Zhang, Chuhang; Akatsuka, Hiroki; Sekiya, Hiroki; Nagase, Tomomi; Nakajima, Atsushi.

In: Chemistry Letters, Vol. 42, No. 8, 2013, p. 857-859.

Research output: Contribution to journalArticle

Tsunoyama, Hironori ; Zhang, Chuhang ; Akatsuka, Hiroki ; Sekiya, Hiroki ; Nagase, Tomomi ; Nakajima, Atsushi. / Development of high-flux ion source for size-selected nanocluster ions based on high-power impulse magnetron sputtering. In: Chemistry Letters. 2013 ; Vol. 42, No. 8. pp. 857-859.
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