TY - JOUR
T1 - Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis
AU - Oka, Tetsuhiro
AU - Itani, Koichi
AU - Taguchi, Yoshihiro
AU - Nagasaka, Yuji
N1 - Funding Information:
Manuscript received August 28, 2011; revised November 1, 2011; accepted November 6, 2011. Date of publication December 21, 2011; date of current version April 4, 2012. This work was unsupported in part by the Japan Society for the Promotion of Science (JSPS), in part by a Grant-in-Aid for Scientific Research (S, No. 19106004), in part by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), and in part by Grant-in-Aid for Young Scientists (A, No. 23686036). Subject Editor J. A. Yeh.
PY - 2012/4
Y1 - 2012/4
N2 - A novel micro optical diffusion sensor (MODS) has been developed that enables high-speed, on-site sensing with a small sample volume and without the use of additives. The diffusion coefficient can be measured by observing the mass diffusion process of the concentration distribution generated by laser-induced dielectrophoresis. In this paper, we propose a novel excitation system using a micro Fresnel mirror (MFM) that consists of two angled micromirrors and can provide interferometric excitation suitable for forming a sinusoidal concentration distribution. In this paper, MFM was successfully fabricated, and mirror angles were in good agreement with the design values calculated by the finite-element method. The contrast of the interference fringe induced by the fabricated MFM was sharp, and its visibility was 0.97. In addition, the diffusion phenomenon induced by MFM was successfully observed as the decay of the diffracted light intensity. As a result, the validity of MFM as an interferometric excitation device for MODS was confirmed.
AB - A novel micro optical diffusion sensor (MODS) has been developed that enables high-speed, on-site sensing with a small sample volume and without the use of additives. The diffusion coefficient can be measured by observing the mass diffusion process of the concentration distribution generated by laser-induced dielectrophoresis. In this paper, we propose a novel excitation system using a micro Fresnel mirror (MFM) that consists of two angled micromirrors and can provide interferometric excitation suitable for forming a sinusoidal concentration distribution. In this paper, MFM was successfully fabricated, and mirror angles were in good agreement with the design values calculated by the finite-element method. The contrast of the interference fringe induced by the fabricated MFM was sharp, and its visibility was 0.97. In addition, the diffusion phenomenon induced by MFM was successfully observed as the decay of the diffracted light intensity. As a result, the validity of MFM as an interferometric excitation device for MODS was confirmed.
KW - Concentration distribution
KW - diffusion coefficient
KW - laser-induced dielectrophoresis (LIDEP)
KW - microelectromechanical systems (MEMS)
KW - micromirror
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U2 - 10.1109/JMEMS.2011.2176922
DO - 10.1109/JMEMS.2011.2176922
M3 - Article
AN - SCOPUS:84859728269
VL - 21
SP - 324
EP - 330
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 2
M1 - 6111227
ER -