Development of Low Strain Clamping Device for Compliant Parts Applying Characteristics of Electro-Rheological Fluid

The deformation of the parts due to the clamping force is one of the issues to be solved in manufacturing or measuring process where extremely high accuracy is required. Especially, it is difficult to clamp the thin and compliant parts without the elastic deformation. In this study, a new mechanical three-point-support clamping device for compliant parts are proposed. The special attention is paid to the electrorehological fluid (ERF) which provides the yield stress under high electric filed intensity. The performance of the developed ERF device was evaluated from the viewpoint of capacity of clamping force, residual strain on the clamped parts and parts holding stability during carry of devices, The result shows the availability of the developed device for the practical applications.