Development of low-voltage fluid-based inclination sensor integrated with CMOS circuitry on ceramic substrate

Asrulnizam Bin Abd Manaf, Kazumasa Nakamura, Yoshinori Matsumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A low-voltage and fluid-based inclination sensor has been developed with one-side electrode structure at the supply voltage of 1.3 V which used in most digital circuitry. The consumption current of the inclination sensor was decreased from 250 μA at Vdd 3.3 V to 38 μA at Vdd 1.3 V by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry of the sensor. The sensor and detection circuitry was integrated on one ceramic substrate. The sensitivity, response time and resolution of sensor were 7 mV/deg, 0.7 s and 0.75° respectively at the supply voltage of 1.3 V.

Original languageEnglish
Title of host publication2008 IEEE Sensors, SENSORS 2008
Pages658-661
Number of pages4
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy
Duration: 2008 Oct 262009 Oct 29

Publication series

NameProceedings of IEEE Sensors

Other

Other2008 IEEE Sensors, SENSORS 2008
CountryItaly
CityLecce
Period08/10/2609/10/29

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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