Development of micro optical diffusion sensor based on laser induced dielectrophoresis

Yoshihiro Taguchi, Koichi Itani, Akira Ebisui, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro-electro mechanical systems (MEMS) biochips realizing high-speed and high-efficiency of reaction and analysis attract much attention in medical as well as chemical fields. Especially, the miniaturized devices enabling small sample volume, arrayed, and portable measurement may become a powerful tool for material analysis and process control. We have proposed a novel micro optical diffusion sensor (MODS) which enables small sample volume, highspeed and non-contact measurement of diffusion coefficient of liquid sample. MODS consists of a pair of transparent electrodes (Al-doped Zinc oxide: AZO), a photoconductive layer (amorphous silicon: a-Si:H), two MEMS mirrors and excitation and probing fibers for inducing and detecting concentration distribution. The initial concentration distribution of sample is created by an opto-dielectrophoretic (opto-DEP) manipulation along with a sinusoidal pattern of irradiated beam on a photoconductive layer. In the present paper, the measurement principle is proposed, and the preliminary experiment using a bench top apparatus is reported.

Original languageEnglish
Title of host publicationProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Pages193-198
Number of pages6
DOIs
Publication statusPublished - 2010 Jul 12
EventASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, China
Duration: 2009 Dec 182009 Dec 21

Publication series

NameProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Volume2

Other

OtherASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
CountryChina
CityShanghai
Period09/12/1809/12/21

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Keywords

  • Diffusion coefficient
  • Microelectromechanical systems
  • Opto- dielectrophoresis
  • Sensing chip

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes

Cite this

Taguchi, Y., Itani, K., Ebisui, A., & Nagasaka, Y. (2010). Development of micro optical diffusion sensor based on laser induced dielectrophoresis. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 (pp. 193-198). (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009; Vol. 2). https://doi.org/10.1115/MNHMT2009-18384