Development of micro optical diffusion sensor based on laser induced dielectrophoresis

Yoshihiro Taguchi, Koichi Itani, Akira Ebisui, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro-electro mechanical systems (MEMS) biochips realizing high-speed and high-efficiency of reaction and analysis attract much attention in medical as well as chemical fields. Especially, the miniaturized devices enabling small sample volume, arrayed, and portable measurement may become a powerful tool for material analysis and process control. We have proposed a novel micro optical diffusion sensor (MODS) which enables small sample volume, highspeed and non-contact measurement of diffusion coefficient of liquid sample. MODS consists of a pair of transparent electrodes (Al-doped Zinc oxide: AZO), a photoconductive layer (amorphous silicon: a-Si:H), two MEMS mirrors and excitation and probing fibers for inducing and detecting concentration distribution. The initial concentration distribution of sample is created by an opto-dielectrophoretic (opto-DEP) manipulation along with a sinusoidal pattern of irradiated beam on a photoconductive layer. In the present paper, the measurement principle is proposed, and the preliminary experiment using a bench top apparatus is reported.

Original languageEnglish
Title of host publicationProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Pages193-198
Number of pages6
Volume2
DOIs
Publication statusPublished - 2010
EventASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, China
Duration: 2009 Dec 182009 Dec 21

Other

OtherASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
CountryChina
CityShanghai
Period09/12/1809/12/21

Fingerprint

Electrophoresis
Lasers
Sensors
Zinc Oxide
Biochips
Zinc oxide
Amorphous silicon
Process control
Electrodes
Fibers
Liquids
Experiments

Keywords

  • Diffusion coefficient
  • Microelectromechanical systems
  • Opto- dielectrophoresis
  • Sensing chip

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes

Cite this

Taguchi, Y., Itani, K., Ebisui, A., & Nagasaka, Y. (2010). Development of micro optical diffusion sensor based on laser induced dielectrophoresis. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 (Vol. 2, pp. 193-198) https://doi.org/10.1115/MNHMT2009-18384

Development of micro optical diffusion sensor based on laser induced dielectrophoresis. / Taguchi, Yoshihiro; Itani, Koichi; Ebisui, Akira; Nagasaka, Yuji.

Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. Vol. 2 2010. p. 193-198.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Taguchi, Y, Itani, K, Ebisui, A & Nagasaka, Y 2010, Development of micro optical diffusion sensor based on laser induced dielectrophoresis. in Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. vol. 2, pp. 193-198, ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, Shanghai, China, 09/12/18. https://doi.org/10.1115/MNHMT2009-18384
Taguchi Y, Itani K, Ebisui A, Nagasaka Y. Development of micro optical diffusion sensor based on laser induced dielectrophoresis. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. Vol. 2. 2010. p. 193-198 https://doi.org/10.1115/MNHMT2009-18384
Taguchi, Yoshihiro ; Itani, Koichi ; Ebisui, Akira ; Nagasaka, Yuji. / Development of micro optical diffusion sensor based on laser induced dielectrophoresis. Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. Vol. 2 2010. pp. 193-198
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