Development of micro optical viscosity sensor with focus control system for in-process monitoring

Yoshihiro Taguchi, R. Nagamachi, H. Abe, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have developed a novel micro optical viscosity sensor (MOVS) based on a laser-induced capillary wave with focus control system enabling non-contact, short-time (several hundreds of nano seconds), small sample volume (several tens of micro litters), and high-stability in situ / in vivo measurement. The microfabricated MOVS chip consists of two deep trenches holding photonic crystal fibers for laser excitation, and three shallow trenches holding the lensed-fibers for probing / detecting and focus controlling. The optical interference fringe excited by two pulsed laser beams heats the sample surface, and the temporal behavior of surface geometry is detected as a first-order diffracted beam, which contains the information of liquid properties (viscosity and surface tension). In order to verify the applicability of MOVS chip for the in-process monitoring of viscosity, the preliminary measurement using acetone are demonstrated.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages29-30
Number of pages2
DOIs
Publication statusPublished - 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 2009 Aug 172009 Aug 20

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period09/8/1709/8/20

Fingerprint

Process monitoring
Viscosity
Control systems
Sensors
Light interference
Laser excitation
Photonic crystal fibers
Acetone
Pulsed lasers
Laser beams
Surface tension
Geometry
Fibers
Lasers
Liquids

Keywords

  • Laser-induced capillary wave
  • Measurement technique
  • Optical interference
  • Surface tension
  • Viscosity

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Taguchi, Y., Nagamachi, R., Abe, H., & Nagasaka, Y. (2009). Development of micro optical viscosity sensor with focus control system for in-process monitoring. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 29-30). [5338622] https://doi.org/10.1109/OMEMS.2009.5338622

Development of micro optical viscosity sensor with focus control system for in-process monitoring. / Taguchi, Yoshihiro; Nagamachi, R.; Abe, H.; Nagasaka, Yuji.

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 29-30 5338622.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Taguchi, Y, Nagamachi, R, Abe, H & Nagasaka, Y 2009, Development of micro optical viscosity sensor with focus control system for in-process monitoring. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338622, pp. 29-30, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 09/8/17. https://doi.org/10.1109/OMEMS.2009.5338622
Taguchi Y, Nagamachi R, Abe H, Nagasaka Y. Development of micro optical viscosity sensor with focus control system for in-process monitoring. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 29-30. 5338622 https://doi.org/10.1109/OMEMS.2009.5338622
Taguchi, Yoshihiro ; Nagamachi, R. ; Abe, H. ; Nagasaka, Yuji. / Development of micro optical viscosity sensor with focus control system for in-process monitoring. 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. pp. 29-30
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