Development of nano and micro SQUIDs based on Al tunnel junctions

Ryosuke Ishiguro, Eiichiro Watanabe, Daisuke Sakuma, Tomoya Shinozaki, Shogo Tsuchiya, Yusuke Nago, Hirotaka Osato, Daiju Tsuya, Hiromi Kashiwaya, Satoshi Kashiwaya, Shintaro Nomura, Hideaki Takayanagi, Yoshiteru Maeno

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)


Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and The magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using The Niemeyer-Dolan technique and The inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report The fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3].

Original languageEnglish
Article number022019
JournalJournal of Physics: Conference Series
Publication statusPublished - 2014
Event27th International Conference on Low Temperature Physics, LT 2014 - Buenos Aires, Argentina
Duration: 2014 Aug 62014 Aug 13

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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