TY - JOUR
T1 - Development of nano and micro SQUIDs based on Al tunnel junctions
AU - Ishiguro, Ryosuke
AU - Watanabe, Eiichiro
AU - Sakuma, Daisuke
AU - Shinozaki, Tomoya
AU - Tsuchiya, Shogo
AU - Nago, Yusuke
AU - Osato, Hirotaka
AU - Tsuya, Daiju
AU - Kashiwaya, Hiromi
AU - Kashiwaya, Satoshi
AU - Nomura, Shintaro
AU - Takayanagi, Hideaki
AU - Maeno, Yoshiteru
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2014
Y1 - 2014
N2 - Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and The magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using The Niemeyer-Dolan technique and The inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report The fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3].
AB - Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and The magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using The Niemeyer-Dolan technique and The inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report The fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3].
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U2 - 10.1088/1742-6596/568/2/022019
DO - 10.1088/1742-6596/568/2/022019
M3 - Conference article
AN - SCOPUS:84919725865
SN - 1742-6588
VL - 568
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
M1 - 022019
T2 - 27th International Conference on Low Temperature Physics, LT 2014
Y2 - 6 August 2014 through 13 August 2014
ER -