Development of nano and micro SQUIDs based on Al tunnel junctions

Ryosuke Ishiguro, Eiichiro Watanabe, Daisuke Sakuma, Tomoya Shinozaki, Shogo Tsuchiya, Yusuke Nago, Hirotaka Osato, Daiju Tsuya, Hiromi Kashiwaya, Satoshi Kashiwaya, Shintaro Nomura, Hideaki Takayanagi, Yoshiteru Maeno

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and The magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using The Niemeyer-Dolan technique and The inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report The fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3].

Original languageEnglish
Article number022019
JournalJournal of Physics: Conference Series
Volume568
DOIs
Publication statusPublished - 2014

Fingerprint

tunnel junctions
interference
vortices
niobium
integrated circuits
lithography
carbon nanotubes
etching
aluminum
magnetization
fabrication
sensitivity
magnetic fields
ions

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Ishiguro, R., Watanabe, E., Sakuma, D., Shinozaki, T., Tsuchiya, S., Nago, Y., ... Maeno, Y. (2014). Development of nano and micro SQUIDs based on Al tunnel junctions. Journal of Physics: Conference Series, 568, [022019]. https://doi.org/10.1088/1742-6596/568/2/022019

Development of nano and micro SQUIDs based on Al tunnel junctions. / Ishiguro, Ryosuke; Watanabe, Eiichiro; Sakuma, Daisuke; Shinozaki, Tomoya; Tsuchiya, Shogo; Nago, Yusuke; Osato, Hirotaka; Tsuya, Daiju; Kashiwaya, Hiromi; Kashiwaya, Satoshi; Nomura, Shintaro; Takayanagi, Hideaki; Maeno, Yoshiteru.

In: Journal of Physics: Conference Series, Vol. 568, 022019, 2014.

Research output: Contribution to journalArticle

Ishiguro, R, Watanabe, E, Sakuma, D, Shinozaki, T, Tsuchiya, S, Nago, Y, Osato, H, Tsuya, D, Kashiwaya, H, Kashiwaya, S, Nomura, S, Takayanagi, H & Maeno, Y 2014, 'Development of nano and micro SQUIDs based on Al tunnel junctions', Journal of Physics: Conference Series, vol. 568, 022019. https://doi.org/10.1088/1742-6596/568/2/022019
Ishiguro, Ryosuke ; Watanabe, Eiichiro ; Sakuma, Daisuke ; Shinozaki, Tomoya ; Tsuchiya, Shogo ; Nago, Yusuke ; Osato, Hirotaka ; Tsuya, Daiju ; Kashiwaya, Hiromi ; Kashiwaya, Satoshi ; Nomura, Shintaro ; Takayanagi, Hideaki ; Maeno, Yoshiteru. / Development of nano and micro SQUIDs based on Al tunnel junctions. In: Journal of Physics: Conference Series. 2014 ; Vol. 568.
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