Development of nanoscale temperature and thermophysical properties measurement method by polarized near-field light

Shunsuke Hosaka, Toshiaki Kasakake, Yoshihiro Taguchi, Yuji Nagasaka

Research output: Contribution to journalArticle

Abstract

Measurement of temperature distribution at nanometer scale is important for the thermal design of high integrated devices. However, in conventional optical measurement techniques, the spatial resolution is limited by the diffraction limit of light, which is approximately half of the wavelength of the optical beam. Therefore, we have developed a novel optical temperature measurement method in nanometer scale using near-field microscope technique. We newly employed the polarization of light into the measurement principle, since the near-field polarization has a high sensitivity for the refraction index of the sample, which varies with temperature. In this method, the near-field optical fiber probe which can maintain the polarization state is necessary for increasing the measurement sensitivity. Hence, we have newly fabricated the single mode near-field optical fiber probe. In this paper, we report the verification of the new measurement principle and the comparison of the measurement sensitivity with the results using temperature dependence of reflectance.

Original languageEnglish
Pages (from-to)1926-1928
Number of pages3
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume76
Issue number768
DOIs
Publication statusPublished - 2010 Aug
Externally publishedYes

Keywords

  • Nanotechnology
  • Near-Field light
  • Optical measurement
  • Polarization
  • Temperature measurement
  • Thermophysical property

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Fingerprint Dive into the research topics of 'Development of nanoscale temperature and thermophysical properties measurement method by polarized near-field light'. Together they form a unique fingerprint.

  • Cite this