Development of Near-Field Infrared Thermometry

Hiroaki Miura; Yoshihiro Taguchi

doi:10.1109/OMN.2018.8454534

Development of Near-Field Infrared Thermometry

Hiroaki Miura, Yoshihiro Taguchi

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Nanoscale thermometry is important for the thermal design of micro and nanodevices. In the measurement, a non-contact, non-destructive method is effective. Our method provides a nanoscale infrared thermometry with a tapered highly efficient near-field fiber probe.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454534
Publication status	Published - 2018 Sept 4
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2018-July
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country/Territory	Switzerland
City	Lausanne
Period	18/7/29 → 18/8/2

Keywords

Infrared
Near-field optics
Thermometry
selective wet etching

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2018.8454534

Cite this

Development of Near-Field Infrared Thermometry. / Miura, Hiroaki; Taguchi, Yoshihiro.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. 8454534 (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Miura, H & Taguchi, Y 2018, Development of Near-Field Infrared Thermometry. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., 8454534, International Conference on Optical MEMS and Nanophotonics, vol. 2018-July, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18/7/29. https://doi.org/10.1109/OMN.2018.8454534

@inproceedings{8ba4bcb224414e1b98339763af717b8d,

title = "Development of Near-Field Infrared Thermometry",

abstract = "Nanoscale thermometry is important for the thermal design of micro and nanodevices. In the measurement, a non-contact, non-destructive method is effective. Our method provides a nanoscale infrared thermometry with a tapered highly efficient near-field fiber probe.",

keywords = "Infrared, Near-field optics, Thermometry, selective wet etching",

author = "Hiroaki Miura and Yoshihiro Taguchi",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",

year = "2018",

month = sep,

day = "4",

doi = "10.1109/OMN.2018.8454534",

language = "English",

isbn = "9781509063727",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",

}

TY - GEN

T1 - Development of Near-Field Infrared Thermometry

AU - Miura, Hiroaki

AU - Taguchi, Yoshihiro

PY - 2018/9/4

Y1 - 2018/9/4

N2 - Nanoscale thermometry is important for the thermal design of micro and nanodevices. In the measurement, a non-contact, non-destructive method is effective. Our method provides a nanoscale infrared thermometry with a tapered highly efficient near-field fiber probe.

AB - Nanoscale thermometry is important for the thermal design of micro and nanodevices. In the measurement, a non-contact, non-destructive method is effective. Our method provides a nanoscale infrared thermometry with a tapered highly efficient near-field fiber probe.

KW - Infrared

KW - Near-field optics

KW - Thermometry

KW - selective wet etching

UR - http://www.scopus.com/inward/record.url?scp=85053899502&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053899502&partnerID=8YFLogxK

U2 - 10.1109/OMN.2018.8454534

DO - 10.1109/OMN.2018.8454534

M3 - Conference contribution

AN - SCOPUS:85053899502

SN - 9781509063727

T3 - International Conference on Optical MEMS and Nanophotonics

BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings

PB - IEEE Computer Society

T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018

Y2 - 29 July 2018 through 2 August 2018

ER -

Development of Near-Field Infrared Thermometry

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this