Development of novel Micro Optical Diffusion Sensor using comb-driven Micro Fresnel Mirror

Y. Matoba, Y. Taguchi, Y. Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a novel Micro Optical Diffusion Sensor (MODS) with a newly proposed comb-driven Micro Fresnel Mirror (MFM) scanner for the sample which structure is changed drastically. To measure the dynamic change of the conformation of the sample, the fringe pattern should be changed in order to maintain the appropriate excitation condition for the accurate measurement. In this study, the pre-tilted mirror is rotated by the vertical comb-driven actuators to change the mirror angle resulting the change of the fringe spacing. In this paper, we confirmed the validity of the proposed mirror scanner and fabricated the prototype device.

Original languageEnglish
Title of host publication17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
PublisherChemical and Biological Microsystems Society
Pages266-268
Number of pages3
ISBN (Print)9781632666246
Publication statusPublished - 2013 Jan 1
Event17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013 - Freiburg, Germany
Duration: 2013 Oct 272013 Oct 31

Publication series

Name17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
Volume1

Other

Other17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
CountryGermany
CityFreiburg
Period13/10/2713/10/31

Keywords

  • Comb-driven actuator
  • Diffusion coefficient
  • Laser induccd diclectrophoresis
  • Micro frcsnel mirror
  • Mlims

ASJC Scopus subject areas

  • Bioengineering

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  • Cite this

    Matoba, Y., Taguchi, Y., & Nagasaka, Y. (2013). Development of novel Micro Optical Diffusion Sensor using comb-driven Micro Fresnel Mirror. In 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013 (pp. 266-268). (17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013; Vol. 1). Chemical and Biological Microsystems Society.