Development of novel micro optical diffusion sensor using micro fresnel mirror

T. Oka, K. Itani, Y. Taguchi, Y. Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We have developed a novel micro optical diffusion sensor (MODS) based on a laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of the protein conformation. We have newly proposed a micro Fresnel mirror (MFM) in order to package a DEP cell and optical components in one chip. MFM, consisting of two angled mirrors, torsion springs, and stiction anchors, can make an excitation laser split into two beams and generate an interference. In this paper, we confirmed the validity of the concept of MFM by the finite element method and the fabricated prototype device.

Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages1292-1294
Number of pages3
Publication statusPublished - 2010 Dec 1
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: 2010 Oct 32010 Oct 7

Publication series

Name14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume2

Other

Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
CountryNetherlands
CityGroningen
Period10/10/310/10/7

Keywords

  • Diffusion coefficient
  • Laser induced dielectrophoresis
  • MEMS
  • Micro Fresnel mirror

ASJC Scopus subject areas

  • Control and Systems Engineering

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