Abstract
We have developed a novel micro optical diffusion sensor (MODS) based on a laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of the protein conformation. We have newly proposed a micro Fresnel mirror (MFM) in order to package a DEP cell and optical components in one chip. MFM, consisting of two angled mirrors, torsion springs, and stiction anchors, can make an excitation laser split into two beams and generate an interference. In this paper, we confirmed the validity of the concept of MFM by the finite element method and the fabricated prototype device.
| Original language | English |
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| Title of host publication | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
| Pages | 1292-1294 |
| Number of pages | 3 |
| Publication status | Published - 2010 Dec 1 |
| Event | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands Duration: 2010 Oct 3 → 2010 Oct 7 |
Publication series
| Name | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Volume | 2 |
Other
| Other | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Country | Netherlands |
| City | Groningen |
| Period | 10/10/3 → 10/10/7 |
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Keywords
- Diffusion coefficient
- Laser induced dielectrophoresis
- MEMS
- Micro Fresnel mirror
ASJC Scopus subject areas
- Control and Systems Engineering
Cite this
Oka, T., Itani, K., Taguchi, Y., & Nagasaka, Y. (2010). Development of novel micro optical diffusion sensor using micro fresnel mirror. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1292-1294). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).