Development of the automatic positioning system of microtool edge in micromachining of glass plate for microfluidic chips

T. Aoyama, N. Takahata

Research output: Contribution to journalArticle

4 Citations (Scopus)


A microfluidic chip is a microscale chemical laboratory, and a glass substrate is used for the material of the chip. Micromachining is an effective process to produce a 3D micropattern on such a glass plate. In the micromachining process, however, the positioning of the contact point of the tool edge on the surface of the glass workpiece is technically difficult. In this study, a new automated positioning system for the microtool edge is developed using the total internal reflection of a laser beam. The developed system is also applied to detect the change in the cutting mode from ductile to brittle.

Original languageEnglish
Pages (from-to)551-554
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Issue number1
Publication statusPublished - 2010 May 14



  • Micromachining
  • Positioning
  • Tool

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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