Diagnostic techniques for studying excimer laser kinetics

W. D. Kimura, F. Kannari, J. F. Seamans, D. R. Guyer

Research output: Contribution to journalConference article

Abstract

Several novel diagnostic techniques have been used to analyze the laser kinetics occurring in electron-beam pumped excimer lasers. Described are a quadrature interferometer for measuring time-dependent electron densities, an overtone absorption technique for measuring the HC1 concentration, a broadband dye laser system for measuring the spectrally resolved gain in XeF, and a hook interferometer for measuring time-dependent excited state densities. These techniques can also be applied to other non-excimer lasers.

Original languageEnglish
Pages (from-to)42-49
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume894
DOIs
Publication statusPublished - 1988 Jul 12
Externally publishedYes
EventGas Laser Technology 1988 - Los Angeles, United States
Duration: 1988 Jan 111988 Jan 17

Fingerprint

Excimer Laser
Excimer lasers
excimer lasers
Interferometers
Diagnostics
Kinetics
Laser
Interferometer
Dye lasers
Lasers
Hooks
kinetics
Excited states
Carrier concentration
Electron beams
interferometers
Excited States
Electron Beam
Dyes
Quadrature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Diagnostic techniques for studying excimer laser kinetics. / Kimura, W. D.; Kannari, F.; Seamans, J. F.; Guyer, D. R.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 894, 12.07.1988, p. 42-49.

Research output: Contribution to journalConference article

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