Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar

M. Ishimaru, T. Ohba, T. Ohmori, T. Yagisawa, T. Kitajima, T. Makabe

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Abstract

An experimental procedure to investigate the spatiotemporal characteristics of electrons in the vicinity of mean energy in a radiofrequency plasma is proposed by using optical emission and absorption spectroscopy in Ar. The method employs optical kinetics of long-lived metastable atom Ar (1 s5) and short-lived excited Ar (2 p9). The electron density distribution ne (z,t) is demonstrated in a typical condition in a two-frequency capacitively coupled plasma, excited at 100 MHz and biased at 500 kHz in pure Ar. The density shows almost time independent characteristics in the bulk plasma and a strong time dependence in the sheath in front of the bias electrode.

Original languageEnglish
Article number071501
JournalApplied Physics Letters
Volume92
Issue number7
DOIs
Publication statusPublished - 2008 Mar 3

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Ishimaru, M., Ohba, T., Ohmori, T., Yagisawa, T., Kitajima, T., & Makabe, T. (2008). Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar. Applied Physics Letters, 92(7), [071501]. https://doi.org/10.1063/1.2844890