Diagnostics of a non-equilibrium inductively coupled plasmas in argon

Akifumi Okigawa, Zoran Lj Petrović, Masahiro Tadokoro, Toshiaki Makabe, Nobuhiko Nakano, Akihiko Itoh

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

An apparatus including a robot manipulated optical system has been built to provide absolute emission data from an inductively coupled plasma operating in argon in non-equilibrium conditions. Data for the two-dimensional population densities of one of the excited states of neutral argon ArI are presented together with the Langmuir probe data for electron density and plasma potential. Measurements were performed at 500 mTorr and 50 mTorr and with 100 seem flow of argon under the constant power condition, 100 W. The data show that excitation profile is almost identical to the radial profile of electron density. At higher pressure maximum excitation and electron density are produced close to the walls, while at low pressure maximum excitation is at the center of the vessel and a high field is formed close to the walls.

Original languageEnglish
Pages (from-to)2644-2646
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number18
Publication statusPublished - 1996 Oct 28

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argon
excitation
nonequilibrium conditions
plasma potentials
electrostatic probes
profiles
robots
vessels
low pressure

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Okigawa, A., Petrović, Z. L., Tadokoro, M., Makabe, T., Nakano, N., & Itoh, A. (1996). Diagnostics of a non-equilibrium inductively coupled plasmas in argon. Applied Physics Letters, 69(18), 2644-2646.

Diagnostics of a non-equilibrium inductively coupled plasmas in argon. / Okigawa, Akifumi; Petrović, Zoran Lj; Tadokoro, Masahiro; Makabe, Toshiaki; Nakano, Nobuhiko; Itoh, Akihiko.

In: Applied Physics Letters, Vol. 69, No. 18, 28.10.1996, p. 2644-2646.

Research output: Contribution to journalArticle

Okigawa, A, Petrović, ZL, Tadokoro, M, Makabe, T, Nakano, N & Itoh, A 1996, 'Diagnostics of a non-equilibrium inductively coupled plasmas in argon', Applied Physics Letters, vol. 69, no. 18, pp. 2644-2646.
Okigawa A, Petrović ZL, Tadokoro M, Makabe T, Nakano N, Itoh A. Diagnostics of a non-equilibrium inductively coupled plasmas in argon. Applied Physics Letters. 1996 Oct 28;69(18):2644-2646.
Okigawa, Akifumi ; Petrović, Zoran Lj ; Tadokoro, Masahiro ; Makabe, Toshiaki ; Nakano, Nobuhiko ; Itoh, Akihiko. / Diagnostics of a non-equilibrium inductively coupled plasmas in argon. In: Applied Physics Letters. 1996 ; Vol. 69, No. 18. pp. 2644-2646.
@article{ec3092a899b34a1a8a5a945124bb76cd,
title = "Diagnostics of a non-equilibrium inductively coupled plasmas in argon",
abstract = "An apparatus including a robot manipulated optical system has been built to provide absolute emission data from an inductively coupled plasma operating in argon in non-equilibrium conditions. Data for the two-dimensional population densities of one of the excited states of neutral argon ArI are presented together with the Langmuir probe data for electron density and plasma potential. Measurements were performed at 500 mTorr and 50 mTorr and with 100 seem flow of argon under the constant power condition, 100 W. The data show that excitation profile is almost identical to the radial profile of electron density. At higher pressure maximum excitation and electron density are produced close to the walls, while at low pressure maximum excitation is at the center of the vessel and a high field is formed close to the walls.",
author = "Akifumi Okigawa and Petrović, {Zoran Lj} and Masahiro Tadokoro and Toshiaki Makabe and Nobuhiko Nakano and Akihiko Itoh",
year = "1996",
month = "10",
day = "28",
language = "English",
volume = "69",
pages = "2644--2646",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "18",

}

TY - JOUR

T1 - Diagnostics of a non-equilibrium inductively coupled plasmas in argon

AU - Okigawa, Akifumi

AU - Petrović, Zoran Lj

AU - Tadokoro, Masahiro

AU - Makabe, Toshiaki

AU - Nakano, Nobuhiko

AU - Itoh, Akihiko

PY - 1996/10/28

Y1 - 1996/10/28

N2 - An apparatus including a robot manipulated optical system has been built to provide absolute emission data from an inductively coupled plasma operating in argon in non-equilibrium conditions. Data for the two-dimensional population densities of one of the excited states of neutral argon ArI are presented together with the Langmuir probe data for electron density and plasma potential. Measurements were performed at 500 mTorr and 50 mTorr and with 100 seem flow of argon under the constant power condition, 100 W. The data show that excitation profile is almost identical to the radial profile of electron density. At higher pressure maximum excitation and electron density are produced close to the walls, while at low pressure maximum excitation is at the center of the vessel and a high field is formed close to the walls.

AB - An apparatus including a robot manipulated optical system has been built to provide absolute emission data from an inductively coupled plasma operating in argon in non-equilibrium conditions. Data for the two-dimensional population densities of one of the excited states of neutral argon ArI are presented together with the Langmuir probe data for electron density and plasma potential. Measurements were performed at 500 mTorr and 50 mTorr and with 100 seem flow of argon under the constant power condition, 100 W. The data show that excitation profile is almost identical to the radial profile of electron density. At higher pressure maximum excitation and electron density are produced close to the walls, while at low pressure maximum excitation is at the center of the vessel and a high field is formed close to the walls.

UR - http://www.scopus.com/inward/record.url?scp=0000331959&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000331959&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0000331959

VL - 69

SP - 2644

EP - 2646

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 18

ER -