Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique

S. Miyake, N. Shimura, T. Makabe, A. Itoh

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

The dc magnetron discharges in Ar are commonly used for thin film deposition. It is essential to investigate the two-dimensional emission profile Φλ(z,r) in order to analyze the geometrical structure of the ring-shaped magnetron discharge. In the present work, an emission-selected computer tomography (ESCT) system was constructed to investigate the three-dimensional structure of the magnetron discharge in Ar. Photons from the discharge are detected by two identical scanning mirror systems, movable both parallel and perpendicular to the electrode, positioned outside the two small orthogonal windows on the chamber. Experiments have been performed in a planar magnetron with an aluminum target having a 100 mm diam and a 20 mm spacing in Ar at a pressure of 0.3 Pa, a current of 40 mA, and a voltage of 290 V. Three lines, Arl(419.8 nm), Arll(434.8 nm), and All(396.2 nm) are selected for the ESCT analysis and discussion of the structure of the discharge. Results from the tomographic imaging showed that the peak in photon production were found at the radius where the magnetic field became parallel to the electrode. The eroded ringlike pattern on the target surface coincided with the radial distribution of photon production in front of the target, and the radial position of the maximum depth of the erosion exactly corresponded to that of the peak emission. The overall features of dc magnetron sputtering were also shown in detail by the present ESCT technology.

Original languageEnglish
Pages (from-to)1135-1139
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume10
Issue number4
DOIs
Publication statusPublished - 1992

Fingerprint

Tomography
Photons
tomography
direct current
Electrodes
Aluminum
photons
Magnetron sputtering
Erosion
Mirrors
electrodes
Magnetic fields
Scanning
Imaging techniques
Thin films
radial distribution
Electric potential
erosion
magnetron sputtering
chambers

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique. / Miyake, S.; Shimura, N.; Makabe, T.; Itoh, A.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 10, No. 4, 1992, p. 1135-1139.

Research output: Contribution to journalArticle

@article{02aea643a3534b199d3c1a86fd11c851,
title = "Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique",
abstract = "The dc magnetron discharges in Ar are commonly used for thin film deposition. It is essential to investigate the two-dimensional emission profile Φλ(z,r) in order to analyze the geometrical structure of the ring-shaped magnetron discharge. In the present work, an emission-selected computer tomography (ESCT) system was constructed to investigate the three-dimensional structure of the magnetron discharge in Ar. Photons from the discharge are detected by two identical scanning mirror systems, movable both parallel and perpendicular to the electrode, positioned outside the two small orthogonal windows on the chamber. Experiments have been performed in a planar magnetron with an aluminum target having a 100 mm diam and a 20 mm spacing in Ar at a pressure of 0.3 Pa, a current of 40 mA, and a voltage of 290 V. Three lines, Arl(419.8 nm), Arll(434.8 nm), and All(396.2 nm) are selected for the ESCT analysis and discussion of the structure of the discharge. Results from the tomographic imaging showed that the peak in photon production were found at the radius where the magnetic field became parallel to the electrode. The eroded ringlike pattern on the target surface coincided with the radial distribution of photon production in front of the target, and the radial position of the maximum depth of the erosion exactly corresponded to that of the peak emission. The overall features of dc magnetron sputtering were also shown in detail by the present ESCT technology.",
author = "S. Miyake and N. Shimura and T. Makabe and A. Itoh",
year = "1992",
doi = "10.1116/1.578215",
language = "English",
volume = "10",
pages = "1135--1139",
journal = "Journal of Vacuum Science and Technology A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",

}

TY - JOUR

T1 - Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique

AU - Miyake, S.

AU - Shimura, N.

AU - Makabe, T.

AU - Itoh, A.

PY - 1992

Y1 - 1992

N2 - The dc magnetron discharges in Ar are commonly used for thin film deposition. It is essential to investigate the two-dimensional emission profile Φλ(z,r) in order to analyze the geometrical structure of the ring-shaped magnetron discharge. In the present work, an emission-selected computer tomography (ESCT) system was constructed to investigate the three-dimensional structure of the magnetron discharge in Ar. Photons from the discharge are detected by two identical scanning mirror systems, movable both parallel and perpendicular to the electrode, positioned outside the two small orthogonal windows on the chamber. Experiments have been performed in a planar magnetron with an aluminum target having a 100 mm diam and a 20 mm spacing in Ar at a pressure of 0.3 Pa, a current of 40 mA, and a voltage of 290 V. Three lines, Arl(419.8 nm), Arll(434.8 nm), and All(396.2 nm) are selected for the ESCT analysis and discussion of the structure of the discharge. Results from the tomographic imaging showed that the peak in photon production were found at the radius where the magnetic field became parallel to the electrode. The eroded ringlike pattern on the target surface coincided with the radial distribution of photon production in front of the target, and the radial position of the maximum depth of the erosion exactly corresponded to that of the peak emission. The overall features of dc magnetron sputtering were also shown in detail by the present ESCT technology.

AB - The dc magnetron discharges in Ar are commonly used for thin film deposition. It is essential to investigate the two-dimensional emission profile Φλ(z,r) in order to analyze the geometrical structure of the ring-shaped magnetron discharge. In the present work, an emission-selected computer tomography (ESCT) system was constructed to investigate the three-dimensional structure of the magnetron discharge in Ar. Photons from the discharge are detected by two identical scanning mirror systems, movable both parallel and perpendicular to the electrode, positioned outside the two small orthogonal windows on the chamber. Experiments have been performed in a planar magnetron with an aluminum target having a 100 mm diam and a 20 mm spacing in Ar at a pressure of 0.3 Pa, a current of 40 mA, and a voltage of 290 V. Three lines, Arl(419.8 nm), Arll(434.8 nm), and All(396.2 nm) are selected for the ESCT analysis and discussion of the structure of the discharge. Results from the tomographic imaging showed that the peak in photon production were found at the radius where the magnetic field became parallel to the electrode. The eroded ringlike pattern on the target surface coincided with the radial distribution of photon production in front of the target, and the radial position of the maximum depth of the erosion exactly corresponded to that of the peak emission. The overall features of dc magnetron sputtering were also shown in detail by the present ESCT technology.

UR - http://www.scopus.com/inward/record.url?scp=21144480967&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=21144480967&partnerID=8YFLogxK

U2 - 10.1116/1.578215

DO - 10.1116/1.578215

M3 - Article

AN - SCOPUS:21144480967

VL - 10

SP - 1135

EP - 1139

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 4

ER -