Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique

S. Miyake, N. Shimura, T. Makabe, A. Itoh

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds