Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy

Terukazu Kokubo, Fumiyoshi Tochikubo, Toshiaki Makabe

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Abstract

The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH4(10%)/H2 under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.

Original languageEnglish
Pages (from-to)818-820
Number of pages3
JournalApplied Physics Letters
Volume56
Issue number9
DOIs
Publication statusPublished - 1990 Dec 1

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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