Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

Takeshi Kitajima, Toshiki Nakano, Seiji Samukawa, Toshiaki Makabe

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The N2 dissociation degrees in a 50 MHz inductively coupled plasma (ICP) are evaluated by a procedure using vacuum ultraviolet optical emission spectroscopy (VUVOES). The number density of N 4S° atoms (nN) is evaluated from the N2 dissociation degree by determining the N2 rotational temperature that is in equilibrium with the gas temperature. The nN evaluated by VUVOES is crosschecked by the nN measured by vacuum ultraviolet absorption spectroscopy (VUVAS). The comparison reveals a fair proportionality between the n Ns evaluated by VUVOES and those measured by VUVAS, suggesting that VUVOES is applicable to the monitoring of N2 dissociation in low-pressure, high-density N2 plasmas. The number density of N 2D° metastables is also measured by VUVAS and found to be comparable to the number density of the ground-level N atoms ( 4S°). The dissociative recombination of with electrons is suggested as a possible mechanism of N 2D° metastable generation that makes the N 2D° density comparable to the N 4S° density in the pulsed N2 ICP during power-off periods.

Original languageEnglish
Article number024018
JournalPlasma Sources Science and Technology
Volume17
Issue number2
DOIs
Publication statusPublished - 2008 May 1

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ultraviolet emission
ultraviolet spectroscopy
absorption spectroscopy
dissociation
optical emission spectroscopy
vacuum
ultraviolet absorption
spectroscopy
gas temperature
atoms
low pressure

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy. / Kitajima, Takeshi; Nakano, Toshiki; Samukawa, Seiji; Makabe, Toshiaki.

In: Plasma Sources Science and Technology, Vol. 17, No. 2, 024018, 01.05.2008.

Research output: Contribution to journalArticle

Kitajima, Takeshi ; Nakano, Toshiki ; Samukawa, Seiji ; Makabe, Toshiaki. / Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy. In: Plasma Sources Science and Technology. 2008 ; Vol. 17, No. 2.
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