Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

Ayako Kimura, Hideyuki Kodama, Tetsuya Suzuki

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.

Original languageEnglish
Pages (from-to)515-517
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number2
DOIs
Publication statusPublished - 2003 Mar 1

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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