TY - JOUR
T1 - Diamond-like carbon films synthesized under atmospheric pressure synthesized on PET substrates
AU - Suzuki, Tetsuya
AU - Kodama, Hideyuki
N1 - Funding Information:
This work was supported by the organization of Kanagawa Academy of Science and Technology, and by the project of “City Area Program” from the Ministry of Education, Culture, Sports, Science, and Technology, Japan and “Environmental-friendly Surface Program”, Kanagawa Prefecture, Japan. We are grateful to Prof. C.P. Klages of Fraunfoher Institute for his helpful comments on the manuscript.
PY - 2009/5
Y1 - 2009/5
N2 - Diamond-like carbon films were synthesized under atmospheric pressure (AP-DLC) and their gas barrier properties and hardness were measured. The AP-DLC films were uniformly obtained by RF-plasma CVD method at room temperature with a size of 450 mm2. The growth rate increased as a function of C2H2 concentration and the average growth rate was around 12 μm/min. The maximum deposition rate was ~ 1 μm/s, which is approximately 2000 times larger than that by low-pressure plasma CVD of 1-2 μm/h. The gas barrier properties of AP-DLC films, ~ 1 μm thick, were 5-10 times larger than those of uncoated PET substrates. The microhardness of AP-DLC films was around 3 GPa, measured by the nano-indentation method. The issue lies in the removal of macro-particles of the films to improve the microhardness and the surface roughness. In this paper, we report the physical properties of DLC films synthesized under atmospheric pressure by the radio-frequency CVD method. We also summarize a brief history of PET bottle coating by vacuum-DLC films, as well as that of the development of atmospheric pressure technology and related DLC films, focused on gas barrier properties and micro-hardness.
AB - Diamond-like carbon films were synthesized under atmospheric pressure (AP-DLC) and their gas barrier properties and hardness were measured. The AP-DLC films were uniformly obtained by RF-plasma CVD method at room temperature with a size of 450 mm2. The growth rate increased as a function of C2H2 concentration and the average growth rate was around 12 μm/min. The maximum deposition rate was ~ 1 μm/s, which is approximately 2000 times larger than that by low-pressure plasma CVD of 1-2 μm/h. The gas barrier properties of AP-DLC films, ~ 1 μm thick, were 5-10 times larger than those of uncoated PET substrates. The microhardness of AP-DLC films was around 3 GPa, measured by the nano-indentation method. The issue lies in the removal of macro-particles of the films to improve the microhardness and the surface roughness. In this paper, we report the physical properties of DLC films synthesized under atmospheric pressure by the radio-frequency CVD method. We also summarize a brief history of PET bottle coating by vacuum-DLC films, as well as that of the development of atmospheric pressure technology and related DLC films, focused on gas barrier properties and micro-hardness.
KW - Atmospheric pressure
KW - Diamond-like carbon
KW - Gas barrier
UR - http://www.scopus.com/inward/record.url?scp=67349199164&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=67349199164&partnerID=8YFLogxK
U2 - 10.1016/j.diamond.2008.11.022
DO - 10.1016/j.diamond.2008.11.022
M3 - Article
AN - SCOPUS:67349199164
VL - 18
SP - 990
EP - 994
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 5-8
ER -