Diamond synthesis by high-gravity d.c. plasma CVD (HGCVD) with active control of the substrate temperature

Yoshiyuki Abe, Stefano Bellingeri, Giovanni Maizza, Masao Ishizuka, Yuji Nagasaka, Tetsuya Suzuki

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In the first part of this paper, subatmospheric CVD methods for diamond thin film synthesis under normal gravity and other conditions are reviewed, following their increased capability for large-scale manufacturing. Emphasis is given to current problems and advances in moderate pressure d.c. plasma CVD operating under normal gravity and high-gravity. In the second part, an experimental technique aimed at solving the problem of temperature uniformity on the substrate surface at high gravity is presented. This technique improved temperature uniformity during diamond deposition at various gravity conditions and allowed a more accurate assessment of the influence of gravity on diamond growth and thin-film morphology.

Original languageEnglish
Pages (from-to)121-127
Number of pages7
JournalActa Astronautica
Volume48
Issue number2-3
DOIs
Publication statusPublished - 2001 Jan 2

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Plasma CVD
Diamonds
Gravitation
Substrates
Temperature
Thin films
Diamond films
Chemical vapor deposition

ASJC Scopus subject areas

  • Aerospace Engineering

Cite this

Diamond synthesis by high-gravity d.c. plasma CVD (HGCVD) with active control of the substrate temperature. / Abe, Yoshiyuki; Bellingeri, Stefano; Maizza, Giovanni; Ishizuka, Masao; Nagasaka, Yuji; Suzuki, Tetsuya.

In: Acta Astronautica, Vol. 48, No. 2-3, 02.01.2001, p. 121-127.

Research output: Contribution to journalArticle

Abe, Yoshiyuki ; Bellingeri, Stefano ; Maizza, Giovanni ; Ishizuka, Masao ; Nagasaka, Yuji ; Suzuki, Tetsuya. / Diamond synthesis by high-gravity d.c. plasma CVD (HGCVD) with active control of the substrate temperature. In: Acta Astronautica. 2001 ; Vol. 48, No. 2-3. pp. 121-127.
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