This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 4Pa 1and 0.02 Pa from20 Pa to 20 Pa, respectively.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering