Differential pressure sensor using a piezoresistive cantilever

Hidetoshi Takahashi, Nguyen Minh Dung, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

84 Citations (Scopus)

Abstract

This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 4Pa 1and 0.02 Pa from20 Pa to 20 Pa, respectively.

Original languageEnglish
Article number055015
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number5
DOIs
Publication statusPublished - 2012 May 1
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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