Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

Takumi Sugimoto; Hidetoshi Takahashi

doi:10.1109/MEMS46641.2020.9056412

Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

Takumi Sugimoto, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	925-927
Number of pages	3
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056412
Publication status	Published - 2020 Jan
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 2020 Jan 18 → 2020 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	20/1/18 → 20/1/22

Keywords

Inclined/rotated lithography
Liquid UV curable material
PEGDA
Photolithography
Suction cup

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS46641.2020.9056412

Cite this

Sugimoto, T., & Takahashi, H. (2020). Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 925-927). [9056412] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056412

Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System. / Sugimoto, Takumi; Takahashi, Hidetoshi.

33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 925-927 9056412 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sugimoto, T & Takahashi, H 2020, Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056412, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 925-927, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 20/1/18. https://doi.org/10.1109/MEMS46641.2020.9056412

Sugimoto T, Takahashi H. Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 925-927. 9056412. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056412

Sugimoto, Takumi ; Takahashi, Hidetoshi. / Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 925-927 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.",

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N2 - This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.

AB - This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.

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Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

Abstract

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Keywords

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