Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

Takumi Sugimoto, Hidetoshi Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages925-927
Number of pages3
ISBN (Electronic)9781728135809
DOIs
Publication statusPublished - 2020 Jan
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 2020 Jan 182020 Jan 22

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
CountryCanada
CityVancouver
Period20/1/1820/1/22

Keywords

  • Inclined/rotated lithography
  • Liquid UV curable material
  • PEGDA
  • Photolithography
  • Suction cup

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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