Discrete distribution of implanted and annealed arsenic atoms in silicon nanowires and its effect on device performance

Masashi Uematsu, Kohei M. Itoh, Gennady Mil'nikov, Hideki Minari, Nobuya Mori

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy