Fingerprint
Dive into the research topics of 'Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device
Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, Hangyeol Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5
Citations
(Scopus)