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Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device
Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, Hangyeol Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5
Citations
(Scopus)