Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device

Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, Hangyeol Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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