Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner

H. Ra; W. Piyawattanametha; Y. Taguchi; O. Solgaard

doi:10.1109/omems.2006.1708317

Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner

H. Ra, W. Piyawattanametha, Y. Taguchi, O. Solgaard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Abstract

This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to increase efficiency. Fluorescence imaging is successfully demonstrated by a table-top microscope system. Images with a field of view (FOV) of 211 μm × 210 μm are acquired at 8 frames per second. The transverse resolution is 5.63 μm and 6.92 μm for the vertical and horizontal dimensions, respectively.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Publisher	IEEE Computer Society
Pages	166-167
Number of pages	2
ISBN (Print)	078039562X, 9780780395626
DOIs	https://doi.org/10.1109/omems.2006.1708317
Publication status	Published - 2006
Externally published	Yes
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 2006 Aug 21 → 2006 Aug 24

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

Other	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	06/8/21 → 06/8/24

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1109/omems.2006.1708317

Cite this

Ra, H., Piyawattanametha, W., Taguchi, Y., & Solgaard, O. (2006). Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 166-167). [1708317] (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). IEEE Computer Society. https://doi.org/10.1109/omems.2006.1708317

Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner. / Ra, H.; Piyawattanametha, W.; Taguchi, Y. et al.
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society, 2006. p. 166-167 1708317 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ra, H, Piyawattanametha, W, Taguchi, Y & Solgaard, O 2006, Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708317, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, IEEE Computer Society, pp. 166-167, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 06/8/21. https://doi.org/10.1109/omems.2006.1708317

Ra H, Piyawattanametha W, Taguchi Y, Solgaard O. Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society. 2006. p. 166-167. 1708317. (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). doi: 10.1109/omems.2006.1708317

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abstract = "This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to increase efficiency. Fluorescence imaging is successfully demonstrated by a table-top microscope system. Images with a field of view (FOV) of 211 μm × 210 μm are acquired at 8 frames per second. The transverse resolution is 5.63 μm and 6.92 μm for the vertical and horizontal dimensions, respectively.",

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Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner

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