Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner

H. Ra, W. Piyawattanametha, Y. Taguchi, O. Solgaard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to increase efficiency. Fluorescence imaging is successfully demonstrated by a table-top microscope system. Images with a field of view (FOV) of 211 μm × 210 μm are acquired at 8 frames per second. The transverse resolution is 5.63 μm and 6.92 μm for the vertical and horizontal dimensions, respectively.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE Computer Society
Pages166-167
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
Publication statusPublished - 2006
Externally publishedYes
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Dual-axes confocal fluorescence microscopy with a two-dimensional MEMS scanner'. Together they form a unique fingerprint.

Cite this