Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Mao Mukaida, Jiwang Yan

Research output: Contribution to journalArticlepeer-review

104 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo'. Together they form a unique fingerprint.

Engineering & Materials Science