Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses

J. Yan, J. Tamaki, K. Syoji, T. Kuriyagawa

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.

Original languageEnglish
Pages (from-to)95-100
Number of pages6
JournalKey Engineering Materials
Volume257-258
Publication statusPublished - 2004 Jan 1
Externally publishedYes

Keywords

  • Aspherical Lens
  • Brittle Material
  • CaF
  • Calcium Fluoride
  • Diamond Turning
  • Ductile Regime Machining
  • Optics
  • Ultra-Precision Cutting

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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    Yan, J., Tamaki, J., Syoji, K., & Kuriyagawa, T. (2004). Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses. Key Engineering Materials, 257-258, 95-100.