Abstract
Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.
| Original language | English |
|---|---|
| Pages (from-to) | 95-100 |
| Number of pages | 6 |
| Journal | Key Engineering Materials |
| Volume | 257-258 |
| Publication status | Published - 2004 |
| Externally published | Yes |
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Keywords
- Aspherical Lens
- Brittle Material
- CaF
- Calcium Fluoride
- Diamond Turning
- Ductile Regime Machining
- Optics
- Ultra-Precision Cutting
ASJC Scopus subject areas
- Ceramics and Composites
- Chemical Engineering (miscellaneous)
Cite this
Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses. / Yan, Jiwang; Tamaki, J.; Syoji, K.; Kuriyagawa, T.
In: Key Engineering Materials, Vol. 257-258, 2004, p. 95-100.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses
AU - Yan, Jiwang
AU - Tamaki, J.
AU - Syoji, K.
AU - Kuriyagawa, T.
PY - 2004
Y1 - 2004
N2 - Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.
AB - Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.
KW - Aspherical Lens
KW - Brittle Material
KW - CaF
KW - Calcium Fluoride
KW - Diamond Turning
KW - Ductile Regime Machining
KW - Optics
KW - Ultra-Precision Cutting
UR - http://www.scopus.com/inward/record.url?scp=17644441328&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=17644441328&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:17644441328
VL - 257-258
SP - 95
EP - 100
JO - Key Engineering Materials
JF - Key Engineering Materials
SN - 1013-9826
ER -