Abstract
Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.
Original language | English |
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Pages (from-to) | 95-100 |
Number of pages | 6 |
Journal | Key Engineering Materials |
Volume | 257-258 |
Publication status | Published - 2004 Jan 1 |
Externally published | Yes |
Keywords
- Aspherical Lens
- Brittle Material
- CaF
- Calcium Fluoride
- Diamond Turning
- Ductile Regime Machining
- Optics
- Ultra-Precision Cutting
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering