Ductile regime tyrning of single crystal silicon with a straight-nosed diamond tool

Jiwang Yan, Katuso Syoji, Hirofumi Suzuki, Tsunemoto Kukiyagawa

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Single crystal Silicon is machined with a straight-nosed diamond tool and the fundamental machining charactersistics are investigated. By obtaining the critical depth of cut based on a simple geometrical model, the effect of crystalline anisotropy on brittle-ductile transition is studied. A homogeneous smooth surface is obtained by controlling the undeformed chip thickness below the minimum critical depth of cut. The cutting chip morphology and machined surface texture with the variation of undeformed chip thickness are observed. An intermediate cutting mode is found to exit between the ductile mode and the brittle mode. Ductile regime turning with gernerating continmous ribbon chips is relatzed at a large tool feed rate. By adopting a diamond tool with chanfered rake face, the machined surface roughness is improved.

Original languageEnglish
Pages (from-to)1345-1349
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume64
Issue number9
Publication statusPublished - 1998
Externally publishedYes

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Diamonds
Single crystals
Silicon
Machining
Anisotropy
Textures
Surface roughness
Crystalline materials

Keywords

  • Brittle-ductile transition
  • Chip formation
  • Critical depth of cut
  • Crystalline anisotropy
  • Diamond turning single crystal silicon
  • Straight-nosed tool

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Ductile regime tyrning of single crystal silicon with a straight-nosed diamond tool. / Yan, Jiwang; Syoji, Katuso; Suzuki, Hirofumi; Kukiyagawa, Tsunemoto.

In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, Vol. 64, No. 9, 1998, p. 1345-1349.

Research output: Contribution to journalArticle

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