Abstract
We numerically predicted the spatial distribution of Ar metastables in an inductively coupled plasma (ICP) source; this distribution may be an indicator of the behavior of long-lived neutral radicals in a reactive plasma. We investigated the effect of metastables on the sustaining mechanism in ICP in Ar. The predicted two-dimensional profile of Ar metastables agreed reasonably well with experimental results. The transition of the sustaining mechanism from direct ionization to stepwise ionization is found as a function of input power at 50 mTorr. In addition, a strong hysteresis of plasma density is predicted between the increasing and decreasing phases of the input power based on the stepwise ionization of Ar metastables in the ICP.
| Original language | English |
|---|---|
| Article number | 113304 |
| Journal | Journal of Applied Physics |
| Volume | 98 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 2005 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)
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Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar. / Sato, Toshikazu; Makabe, Toshiaki.
In: Journal of Applied Physics, Vol. 98, No. 11, 113304, 2005.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar
AU - Sato, Toshikazu
AU - Makabe, Toshiaki
PY - 2005
Y1 - 2005
N2 - We numerically predicted the spatial distribution of Ar metastables in an inductively coupled plasma (ICP) source; this distribution may be an indicator of the behavior of long-lived neutral radicals in a reactive plasma. We investigated the effect of metastables on the sustaining mechanism in ICP in Ar. The predicted two-dimensional profile of Ar metastables agreed reasonably well with experimental results. The transition of the sustaining mechanism from direct ionization to stepwise ionization is found as a function of input power at 50 mTorr. In addition, a strong hysteresis of plasma density is predicted between the increasing and decreasing phases of the input power based on the stepwise ionization of Ar metastables in the ICP.
AB - We numerically predicted the spatial distribution of Ar metastables in an inductively coupled plasma (ICP) source; this distribution may be an indicator of the behavior of long-lived neutral radicals in a reactive plasma. We investigated the effect of metastables on the sustaining mechanism in ICP in Ar. The predicted two-dimensional profile of Ar metastables agreed reasonably well with experimental results. The transition of the sustaining mechanism from direct ionization to stepwise ionization is found as a function of input power at 50 mTorr. In addition, a strong hysteresis of plasma density is predicted between the increasing and decreasing phases of the input power based on the stepwise ionization of Ar metastables in the ICP.
UR - http://www.scopus.com/inward/record.url?scp=29144478382&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=29144478382&partnerID=8YFLogxK
U2 - 10.1063/1.2137883
DO - 10.1063/1.2137883
M3 - Article
AN - SCOPUS:29144478382
VL - 98
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 11
M1 - 113304
ER -