Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar

Toshikazu Sato, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar'. Together they form a unique fingerprint.

Physics & Astronomy