This paper investigates the effect of the addition of nitrogen in FePt layers for ultrathin FePt/AlN multilayer structures. X-ray diffraction results reveal that a compressive stress relaxation occurs after annealing owing to the release of interstitial nitrogen atoms in the FePt layers. The introduction of nitrogen also induces a large in-plane compressive strain during grain growth not seen in FePt deposited without nitrogen. This strain is considered to decrease the driving force for (111) grain growth and FePt ordering.
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2014 Sep|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films