Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H0H+) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elasticinelastic collision forces. From the EEDF, spatial distributions of H0H+ production rate were obtained. The results suggest that spatial non-uniformity of H0H + productions is enhanced by high energy component of EEDF.
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