Effect of non-uniform electron energy distribution function on plasma production in large arc driven negative ion source

T. Shibata, S. Koga, R. Terasaki, T. Inoue, M. Dairaku, M. Kashiwagi, M. Taniguchi, H. Tobari, K. Tsuchida, N. Umeda, K. Watanabe, A. Hatayama

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H0H+) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elasticinelastic collision forces. From the EEDF, spatial distributions of H0H+ production rate were obtained. The results suggest that spatial non-uniformity of H0H + productions is enhanced by high energy component of EEDF.

Original languageEnglish
Article number02A719
JournalReview of Scientific Instruments
Volume83
Issue number2
DOIs
Publication statusPublished - 2012 Feb

ASJC Scopus subject areas

  • Instrumentation

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