Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method

Hiroyuki Hasegawa, Masahiro Kawate, Tetsuya Suzuki

Research output: Contribution to journalArticle

52 Citations (Scopus)

Abstract

Cr1-XAlXN and Zr1-XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-XAlXN and Zr1-XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-XAlXN and Zr1-XAlXN.

Original languageEnglish
Pages (from-to)2409-2413
Number of pages5
JournalSurface and Coatings Technology
Volume200
Issue number7
DOIs
Publication statusPublished - 2005 Dec 21

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arcs
microstructure
Microstructure
wurtzite
Microhardness
microhardness
Diffraction patterns
Lattice constants
lattice parameters
diffraction patterns
hardness
Metals
Hardness
X ray diffraction
metals
x rays

Keywords

  • CrAlN
  • Microhardness
  • Microstructure
  • ZrAlN

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method. / Hasegawa, Hiroyuki; Kawate, Masahiro; Suzuki, Tetsuya.

In: Surface and Coatings Technology, Vol. 200, No. 7, 21.12.2005, p. 2409-2413.

Research output: Contribution to journalArticle

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