Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method

Hiroyuki Hasegawa, Masahiro Kawate, Tetsuya Suzuki

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56 Citations (Scopus)


Cr1-XAlXN and Zr1-XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-XAlXN and Zr1-XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-XAlXN and Zr1-XAlXN.

Original languageEnglish
Pages (from-to)2409-2413
Number of pages5
JournalSurface and Coatings Technology
Issue number7
Publication statusPublished - 2005 Dec 21


  • CrAlN
  • Microhardness
  • Microstructure
  • ZrAlN

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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