Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method

T. Sato; T. Yamamoto; H. Hasegawa; T. Suzuki

doi:10.1016/j.surfcoat.2006.01.068

Effects of boron contents on microstructures and microhardness in Cr_xAl_yN films synthesized by cathodic arc method

T. Sato, T. Yamamoto, H. Hasegawa, T. Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Cr_xAl_yB_zN films were synthesized by the cathodic arc method, using Cr_xAl_yB_z alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of Cr_xAl_yB_zN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of Cr_xAl_yB_zN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of Cr_xAl_yB_zN disappeared and grain size decreased with incorporations of B atoms. In this study, Cr_xAl_yB_zN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.

Original language	English
Pages (from-to)	1348-1351
Number of pages	4
Journal	Surface and Coatings Technology
Volume	201
Issue number	3-4
DOIs	https://doi.org/10.1016/j.surfcoat.2006.01.068
Publication status	Published - 2006 Oct 5

Keywords

(Cr,Al,B)N
Microhardness
Microstructure

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/j.surfcoat.2006.01.068

Cite this

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title = "Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method",

abstract = "CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.",

keywords = "(Cr,Al,B)N, Microhardness, Microstructure",

author = "T. Sato and T. Yamamoto and H. Hasegawa and T. Suzuki",

note = "Funding Information: This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.",

year = "2006",

month = oct,

day = "5",

doi = "10.1016/j.surfcoat.2006.01.068",

language = "English",

volume = "201",

pages = "1348--1351",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

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TY - JOUR

T1 - Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method

AU - Sato, T.

AU - Yamamoto, T.

AU - Hasegawa, H.

AU - Suzuki, T.

N1 - Funding Information: This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.

PY - 2006/10/5

Y1 - 2006/10/5

N2 - CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.

AB - CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.

KW - (Cr,Al,B)N

KW - Microhardness

KW - Microstructure

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