Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method

T. Sato, T. Yamamoto, H. Hasegawa, T. Suzuki

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5 Citations (Scopus)


CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.

Original languageEnglish
Pages (from-to)1348-1351
Number of pages4
JournalSurface and Coatings Technology
Issue number3-4
Publication statusPublished - 2006 Oct 5


  • (Cr,Al,B)N
  • Microhardness
  • Microstructure

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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