Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method

Hiroyuki Hasegawa, Tetsuya Suzuki

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).

Original languageEnglish
Pages (from-to)234-240
Number of pages7
JournalSurface and Coatings Technology
Volume188-189
Issue number1-3 SPEC.ISS.
DOIs
Publication statusPublished - 2004 Nov 1

Keywords

  • Cathodic arc method
  • Micro-hardness
  • Microstructure
  • Second metal content
  • Ternary nitride film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method'. Together they form a unique fingerprint.

  • Cite this