Abstract
Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).
| Original language | English |
|---|---|
| Pages (from-to) | 234-240 |
| Number of pages | 7 |
| Journal | Surface and Coatings Technology |
| Volume | 188-189 |
| Issue number | 1-3 SPEC.ISS. |
| DOIs | |
| Publication status | Published - 2004 Nov |
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Keywords
- Cathodic arc method
- Micro-hardness
- Microstructure
- Second metal content
- Ternary nitride film
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method. / Hasegawa, Hiroyuki; Suzuki, Tetsuya.
In: Surface and Coatings Technology, Vol. 188-189, No. 1-3 SPEC.ISS., 11.2004, p. 234-240.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method
AU - Hasegawa, Hiroyuki
AU - Suzuki, Tetsuya
PY - 2004/11
Y1 - 2004/11
N2 - Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).
AB - Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).
KW - Cathodic arc method
KW - Micro-hardness
KW - Microstructure
KW - Second metal content
KW - Ternary nitride film
UR - http://www.scopus.com/inward/record.url?scp=14644416577&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=14644416577&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2004.08.033
DO - 10.1016/j.surfcoat.2004.08.033
M3 - Article
VL - 188-189
SP - 234
EP - 240
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1-3 SPEC.ISS.
ER -