Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method

Hiroyuki Hasegawa, Tetsuya Suzuki

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).

Original languageEnglish
Pages (from-to)234-240
Number of pages7
JournalSurface and Coatings Technology
Volume188-189
Issue number1-3 SPEC.ISS.
DOIs
Publication statusPublished - 2004 Nov

Fingerprint

Nitrides
Microhardness
microhardness
nitrides
arcs
Metals
microstructure
Microstructure
metals
Transmission electron microscopy
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
Crystal lattices
Lattice constants
lattice parameters
hardness
Physical properties
physical properties
Crystal structure

Keywords

  • Cathodic arc method
  • Micro-hardness
  • Microstructure
  • Second metal content
  • Ternary nitride film

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method. / Hasegawa, Hiroyuki; Suzuki, Tetsuya.

In: Surface and Coatings Technology, Vol. 188-189, No. 1-3 SPEC.ISS., 11.2004, p. 234-240.

Research output: Contribution to journalArticle

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