TY - JOUR
T1 - Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method
AU - Hasegawa, Hiroyuki
AU - Suzuki, Tetsuya
N1 - Funding Information:
This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.
PY - 2004/11
Y1 - 2004/11
N2 - Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).
AB - Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).
KW - Cathodic arc method
KW - Micro-hardness
KW - Microstructure
KW - Second metal content
KW - Ternary nitride film
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U2 - 10.1016/j.surfcoat.2004.08.033
DO - 10.1016/j.surfcoat.2004.08.033
M3 - Article
AN - SCOPUS:14644416577
VL - 188-189
SP - 234
EP - 240
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1-3 SPEC.ISS.
ER -