Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method

Hiroyuki Hasegawa; Tetsuya Suzuki

doi:10.1016/j.surfcoat.2004.08.033

Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method

Hiroyuki Hasegawa, Tetsuya Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

39 Citations (Scopus)

Abstract

Current status of ternary nitride films such as Ti_1-X Al_XN, Ti_1-XCr_XN, Ti_1-X Zr_XN, Cr_1-XAl_XN, Zr_1-X Al_XN and Ti_1-XW_XN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).

Original language	English
Pages (from-to)	234-240
Number of pages	7
Journal	Surface and Coatings Technology
Volume	188-189
Issue number	1-3 SPEC.ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2004.08.033
Publication status	Published - 2004 Nov 1

Keywords

Cathodic arc method
Micro-hardness
Microstructure
Second metal content
Ternary nitride film

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method",

abstract = "Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).",

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AU - Hasegawa, Hiroyuki

AU - Suzuki, Tetsuya

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