Effects of thermal annealing on phase transformation and microhardness of (TixCryAlz)N films

T. Yamamoto, H. Hasegawa, Tetsuya Suzuki, K. Yamamoto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

(TixCryAlz)N (x + y + z = 1) films with different atomic compositions were synthesized by the arc ion plating (AIP) method and annealed in vacuum from 700 to 1000 °C. The c-(Ti0.10Cr0.24Al0.66)N and c-(Ti0.27Cr0.11Al0.62)N films maintained the NaCl-type structure after annealing at 800 and 900 °C, respectively. While at 1000 °C, the structure of films was partially transformed into h-(TixCryAlz) N. The lattice parameter of films annealed at 1000 °C increased compared to those between 700 and 900 °C through possibly the diffusion of Al atoms from cubic to hexagonal grains. Due to the formation of the mixture phase by annealing at 1000 °C, microhardness of the film decreased from 31 to 24 GPa. In this paper, mechanical properties were determined using nanoindentation technique and microstructures, lattice parameter were investigated by X-ray and transmission electron microscopy. The observed phase transition was analyzed as a function of the annealing temperature.

Original languageEnglish
Pages (from-to)321-325
Number of pages5
JournalSurface and Coatings Technology
Volume200
Issue number1-4 SPEC. ISS.
DOIs
Publication statusPublished - 2005 Oct 1

Fingerprint

Microhardness
microhardness
phase transformations
Phase transitions
Annealing
annealing
Lattice constants
lattice parameters
ion plating
Nanoindentation
nanoindentation
Plating
arcs
Hot Temperature
Vacuum
mechanical properties
Ions
Transmission electron microscopy
X rays
Atoms

Keywords

  • (TiCrAl)N
  • Microhardness
  • Phase transition
  • Post thermal treatment

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Effects of thermal annealing on phase transformation and microhardness of (TixCryAlz)N films. / Yamamoto, T.; Hasegawa, H.; Suzuki, Tetsuya; Yamamoto, K.

In: Surface and Coatings Technology, Vol. 200, No. 1-4 SPEC. ISS., 01.10.2005, p. 321-325.

Research output: Contribution to journalArticle

Yamamoto, T. ; Hasegawa, H. ; Suzuki, Tetsuya ; Yamamoto, K. / Effects of thermal annealing on phase transformation and microhardness of (TixCryAlz)N films. In: Surface and Coatings Technology. 2005 ; Vol. 200, No. 1-4 SPEC. ISS. pp. 321-325.
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