TY - JOUR
T1 - Effects of thermal annealing on phase transformation and microhardness of (TixCryAlz)N films
AU - Yamamoto, T.
AU - Hasegawa, H.
AU - Suzuki, T.
AU - Yamamoto, K.
N1 - Funding Information:
This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.
PY - 2005/10/1
Y1 - 2005/10/1
N2 - (TixCryAlz)N (x + y + z = 1) films with different atomic compositions were synthesized by the arc ion plating (AIP) method and annealed in vacuum from 700 to 1000 °C. The c-(Ti0.10Cr0.24Al0.66)N and c-(Ti0.27Cr0.11Al0.62)N films maintained the NaCl-type structure after annealing at 800 and 900 °C, respectively. While at 1000 °C, the structure of films was partially transformed into h-(TixCryAlz) N. The lattice parameter of films annealed at 1000 °C increased compared to those between 700 and 900 °C through possibly the diffusion of Al atoms from cubic to hexagonal grains. Due to the formation of the mixture phase by annealing at 1000 °C, microhardness of the film decreased from 31 to 24 GPa. In this paper, mechanical properties were determined using nanoindentation technique and microstructures, lattice parameter were investigated by X-ray and transmission electron microscopy. The observed phase transition was analyzed as a function of the annealing temperature.
AB - (TixCryAlz)N (x + y + z = 1) films with different atomic compositions were synthesized by the arc ion plating (AIP) method and annealed in vacuum from 700 to 1000 °C. The c-(Ti0.10Cr0.24Al0.66)N and c-(Ti0.27Cr0.11Al0.62)N films maintained the NaCl-type structure after annealing at 800 and 900 °C, respectively. While at 1000 °C, the structure of films was partially transformed into h-(TixCryAlz) N. The lattice parameter of films annealed at 1000 °C increased compared to those between 700 and 900 °C through possibly the diffusion of Al atoms from cubic to hexagonal grains. Due to the formation of the mixture phase by annealing at 1000 °C, microhardness of the film decreased from 31 to 24 GPa. In this paper, mechanical properties were determined using nanoindentation technique and microstructures, lattice parameter were investigated by X-ray and transmission electron microscopy. The observed phase transition was analyzed as a function of the annealing temperature.
KW - (TiCrAl)N
KW - Microhardness
KW - Phase transition
KW - Post thermal treatment
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U2 - 10.1016/j.surfcoat.2005.02.048
DO - 10.1016/j.surfcoat.2005.02.048
M3 - Article
AN - SCOPUS:24644443758
VL - 200
SP - 321
EP - 325
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1-4 SPEC. ISS.
ER -