Effects of thermal annealing on phase transformation and microhardness of (Ti_xCr_yAl_z)N films

Engineering & Materials Science

• Annealing 91%
• Atoms 19%
• Chemical analysis 12%
• Hot Temperature 44%
• Ions 17%
• Lattice constants 55%
• Mechanical properties 12%
• Microhardness 92%
• Microstructure 12%
• Nanoindentation 22%
• Phase transitions 96%
• Plating 20%
• Sodium chloride 19%
• Temperature 7%
• Transmission electron microscopy 19%
• Vacuum 16%
• X rays 16%

Physics & Astronomy

• annealing 55%
• arcs 15%
• atoms 9%
• ion plating 24%
• lattice parameters 32%
• mechanical properties 12%
• microhardness 86%
• microstructure 10%
• nanoindentation 18%
• phase transformations 81%
• temperature 5%
• transmission electron microscopy 12%
• vacuum 11%
• x rays 8%

Chemical Compounds

• Annealing 72%
• Cubic Space Group 15%
• Diffusion 11%
• Hexagonal Space Group 14%
• Ion 7%
• Lattice Parameter 35%
• Liquid Film 44%
• Microhardness 100%
• Microstructure 12%
• Mixture 8%
• Transmission Electron Microscopy 12%
• Vacuum 14%
• X-Ray 11%