Efficient femtosecond laser surface patterning using high dielectric constant particles with small size parameter

Minoru Obara, Yuto Tanaka, Go Obara, Akira Zenidaka, Mitsuhiro Terakawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We present results on near-field ablation using Mie resonance high dielectric constant particles with small size parameter for establishing a new downsizing technique for nanopatterning. In this article, we first describe a comparative study of near-field properties on substrates using metallic and dielectric nanoparticle. The results indicate that combination of particle and substrate for efficient localized near-field nano-processing is important for selecting either metallic or dielectric particle. We then demonstrate nanoablation using a Mie resonance high dielectric constant small particle. Theoretical calculations clarified that the maximal enhancement factor and spot diameter close to the smallest size are obtainable on both low-refractive-index (SiO2) and high-refractive-index (Si) substrates using a 200 nm Mie resonance dielectric particle (n∼2.7) at magnetic quadrupole mode with 400 nm excitation wavelength. Experimental results with 200 nm amorphous TiO 2 particles (n=2.66+0.024i) by 400 nm femtosecond laser irradiation verified that clear circular nanoholes with about 100 nm in diameter were fabricated on both substrates even with laser fluence lower than a half ablation threshold of the bare substrates. As for nanopatterning with two-dimensionally arrayed 200 nm amorphous TiO2particles, cohesion of nanoholes was observed in high laser fluence regime due to inter-particle near-field interaction.

    Original languageEnglish
    Title of host publicationXVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
    DOIs
    Publication statusPublished - 2010 Dec 1
    Event18th International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - Sofia, Bulgaria
    Duration: 2010 Aug 302010 Sep 3

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    Volume7751
    ISSN (Print)0277-786X

    Other

    Other18th International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
    CountryBulgaria
    CitySofia
    Period10/8/3010/9/3

    Keywords

    • Mie scattering
    • femtosecond laser
    • nanofabrication
    • near-field optics
    • surface plasmon

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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  • Cite this

    Obara, M., Tanaka, Y., Obara, G., Zenidaka, A., & Terakawa, M. (2010). Efficient femtosecond laser surface patterning using high dielectric constant particles with small size parameter. In XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers [77511V] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7751). https://doi.org/10.1117/12.881321