Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

Kazuyuki Ito, Masayuki Katagiri, Tadashi Sakai, Yuji Awano

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.

Original languageEnglish
Article number06GD08
JournalJapanese Journal of Applied Physics
Volume52
Issue number6 PART 2
DOIs
Publication statusPublished - 2013 Jun

Fingerprint

wiring
Electric wiring
Graphene
integrated circuits
graphene
Multilayers
electrical resistivity
Sheet resistance
Transmission electron microscopy
Acoustic impedance
Ladders
transmission electron microscopy
large scale integration
Atomic force microscopy
electrical resistance
ladders
simulation
Electrodes
Integrated circuit interconnects
Networks (circuits)

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects. / Ito, Kazuyuki; Katagiri, Masayuki; Sakai, Tadashi; Awano, Yuji.

In: Japanese Journal of Applied Physics, Vol. 52, No. 6 PART 2, 06GD08, 06.2013.

Research output: Contribution to journalArticle

@article{b41043767e9a4f728a7d160075c8919c,
title = "Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects",
abstract = "To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.",
author = "Kazuyuki Ito and Masayuki Katagiri and Tadashi Sakai and Yuji Awano",
year = "2013",
month = "6",
doi = "10.7567/JJAP.52.06GD08",
language = "English",
volume = "52",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "6 PART 2",

}

TY - JOUR

T1 - Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

AU - Ito, Kazuyuki

AU - Katagiri, Masayuki

AU - Sakai, Tadashi

AU - Awano, Yuji

PY - 2013/6

Y1 - 2013/6

N2 - To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.

AB - To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.

UR - http://www.scopus.com/inward/record.url?scp=84880999007&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84880999007&partnerID=8YFLogxK

U2 - 10.7567/JJAP.52.06GD08

DO - 10.7567/JJAP.52.06GD08

M3 - Article

AN - SCOPUS:84880999007

VL - 52

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6 PART 2

M1 - 06GD08

ER -