Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

Kazuyuki Ito, Masayuki Katagiri, Tadashi Sakai, Yuji Awano

    Research output: Contribution to journalArticle

    7 Citations (Scopus)

    Abstract

    To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.

    Original languageEnglish
    Article number06GD08
    JournalJapanese journal of applied physics
    Volume52
    Issue number6 PART 2
    DOIs
    Publication statusPublished - 2013 Jun 1

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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