Electron beam nanoprocessing of a carbon nanotube film using a variable pressure scanning electron microscope

Jun Ichi Niitsuma, Takashi Sekiguchi, Xiao Li Yuan, Yuji Awano

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.

Original languageEnglish
Pages (from-to)2356-2360
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Volume7
Issue number7
DOIs
Publication statusPublished - 2007 Jul
Externally publishedYes

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Keywords

  • Carbon nanotube
  • Electron beam
  • Environmental SEM
  • Nanoprocessing
  • Variable-pressure SEM

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Materials Science (miscellaneous)
  • Engineering (miscellaneous)

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