Abstract
We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.
| Original language | English |
|---|---|
| Pages (from-to) | 2356-2360 |
| Number of pages | 5 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 7 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2007 Jul |
| Externally published | Yes |
Keywords
- Carbon nanotube
- Electron beam
- Environmental SEM
- Nanoprocessing
- Variable-pressure SEM
ASJC Scopus subject areas
- Bioengineering
- Chemistry(all)
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics