### Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O_{2} magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Original language | English |
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Pages (from-to) | 997-1004 |

Number of pages | 8 |

Journal | Journal of Physics D: Applied Physics |

Volume | 38 |

Issue number | 7 |

DOIs | |

Publication status | Published - 2005 Apr 7 |

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### ASJC Scopus subject areas

- Physics and Astronomy (miscellaneous)

### Cite this

_{2}magnetron discharges.

*Journal of Physics D: Applied Physics*,

*38*(7), 997-1004. https://doi.org/10.1088/0022-3727/38/7/006

**Electron transport coefficients in O _{2} magnetron discharges.** / White, R. D.; Robson, R. E.; Ness, K. F.; Makabe, T.

Research output: Contribution to journal › Article

_{2}magnetron discharges',

*Journal of Physics D: Applied Physics*, vol. 38, no. 7, pp. 997-1004. https://doi.org/10.1088/0022-3727/38/7/006

_{2}magnetron discharges. Journal of Physics D: Applied Physics. 2005 Apr 7;38(7):997-1004. https://doi.org/10.1088/0022-3727/38/7/006

}

TY - JOUR

T1 - Electron transport coefficients in O2 magnetron discharges

AU - White, R. D.

AU - Robson, R. E.

AU - Ness, K. F.

AU - Makabe, T.

PY - 2005/4/7

Y1 - 2005/4/7

N2 - Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

AB - Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

UR - http://www.scopus.com/inward/record.url?scp=17444383486&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17444383486&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/38/7/006

DO - 10.1088/0022-3727/38/7/006

M3 - Article

AN - SCOPUS:17444383486

VL - 38

SP - 997

EP - 1004

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 7

ER -