## Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O_{2} magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Original language | English |
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Pages (from-to) | 997-1004 |

Number of pages | 8 |

Journal | Journal of Physics D: Applied Physics |

Volume | 38 |

Issue number | 7 |

DOIs | |

Publication status | Published - 2005 Apr 7 |

## ASJC Scopus subject areas

- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films