Electron transport coefficients in O2 magnetron discharges

R. D. White, R. E. Robson, K. F. Ness, T. Makabe

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Original languageEnglish
Pages (from-to)997-1004
Number of pages8
JournalJournal of Physics D: Applied Physics
Volume38
Issue number7
DOIs
Publication statusPublished - 2005 Apr 7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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