Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Koichiro Iwasa, Tetsuhiko Isobe, Mamoru Senna

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.

Original languageEnglish
Pages (from-to)71-78
Number of pages8
JournalSolid State Ionics
Volume101-103
Issue numberPART 1
Publication statusPublished - 1997 Nov

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Keywords

  • Sputter target
  • Surface reaction layer
  • Wet grinding

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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