Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling

T. Itoh; Y. Sunada; F. Kannari

doi:10.1109/27.279025

Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling

T. Itoh, Y. Sunada, F. Kannari

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2gases downstream are measured with time-resolved spectroscopic methods.

Original language	English
Pages (from-to)	210-216
Number of pages	7
Journal	IEEE Transactions on Plasma Science
Volume	22
Issue number	2
DOIs	https://doi.org/10.1109/27.279025
Publication status	Published - 1994 Apr

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/27.279025

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title = "Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling",

abstract = "A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2gases downstream are measured with time-resolved spectroscopic methods.",

author = "T. Itoh and Y. Sunada and F. Kannari",

note = "Funding Information: Manuscript received July 14, 1993; revised December 23, 1993. This research was partially supported by Grant-in-Aid for Encouragement of Young Scientists from the Ministry of Education, Science and Culture, by the Gakuji-Shinkou-Shikin from Keio University, and by the Kawakami Foundation. The authors are with the Department of Electrical Engineering, Faculty of Science and Technology. Keio University, Yokohama 223, Japan. IEEE Log Number 9216011.",

year = "1994",

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doi = "10.1109/27.279025",

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pages = "210--216",

journal = "IEEE Transactions on Plasma Science",

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T1 - Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling

AU - Itoh, T.

AU - Sunada, Y.

AU - Kannari, F.

N1 - Funding Information: Manuscript received July 14, 1993; revised December 23, 1993. This research was partially supported by Grant-in-Aid for Encouragement of Young Scientists from the Ministry of Education, Science and Culture, by the Gakuji-Shinkou-Shikin from Keio University, and by the Kawakami Foundation. The authors are with the Department of Electrical Engineering, Faculty of Science and Technology. Keio University, Yokohama 223, Japan. IEEE Log Number 9216011.

PY - 1994/4

Y1 - 1994/4

N2 - A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2gases downstream are measured with time-resolved spectroscopic methods.

AB - A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2gases downstream are measured with time-resolved spectroscopic methods.

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Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling

Abstract

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