Enhancement of Kr2 excimer generation in a pulsed rare-gas jet discharge with H2 gas contact cooling

T. Itoh, Y. Sunada, Fumihiko Kannari

Research output: Contribution to journalArticle

Abstract

A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2 neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2 excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2 gases downstream are measured with time-resolved spectroscopic methods.

Original languageEnglish
Pages (from-to)210-216
Number of pages7
JournalIEEE Transactions on Plasma Science
Volume22
Issue number2
DOIs
Publication statusPublished - 1994 Apr

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gas jets
excimers
rare gases
cooling
augmentation
neutral gases
high temperature plasmas
vacuum chambers
gases
plasma jets
gas flow
electron energy
collisions
pulses
excitation

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Enhancement of Kr2 excimer generation in a pulsed rare-gas jet discharge with H2 gas contact cooling. / Itoh, T.; Sunada, Y.; Kannari, Fumihiko.

In: IEEE Transactions on Plasma Science, Vol. 22, No. 2, 04.1994, p. 210-216.

Research output: Contribution to journalArticle

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