Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching

Norihisa Miki, C. J. Teo, L. C. Ho, X. Zhang

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

High-precision fabrication is indispensable for high-speed silicon micro-rotors for power MEMS applications so as to minimize the rotor imbalance that deteriorates the rotor performance. Etch variation of deep reactive ion etch (DRIE) process results in differences in rotor blade heights and thus rotor imbalance. A Fourier transform of the etch non-uniformity along the rotor circumference revealed the global etch variation across the wafer and local variations in etch rates depending on the concentration or proximity of the patterned geometry. Rotor imbalance arising from the global etch variation of DRIE process was estimated, which compared favorably to results obtained from spinning experiments. The global etch non-uniformity which culminates in rotor imbalance could be alleviated to 0.25% across a rotor of 4.2 mm diameter by optimizing the plasma chamber pressure. The developed DRIE recipe successfully reduced the rotor imbalance and thus enhanced the rotordynamic performance. The manufacturing processes presented herein are readily applicable to the construction of other microstructures containing intricate geometries and large etched areas.

Original languageEnglish
Pages (from-to)263-267
Number of pages5
JournalSensors and Actuators, A: Physical
Volume104
Issue number3
DOIs
Publication statusPublished - 2003 May 15
Externally publishedYes

Fingerprint

rotor dynamics
Reactive ion etching
rotors
microelectromechanical systems
MEMS
Rotors
high speed
etching
augmentation
ions
nonuniformity
Ions
rotor blades
pressure chambers
circumferences
Geometry
geometry
Silicon
metal spinning
proximity

Keywords

  • Deep reactive ion etching
  • Etch uniformity
  • High-speed rotor
  • Power MEMS
  • Rotordynamics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching. / Miki, Norihisa; Teo, C. J.; Ho, L. C.; Zhang, X.

In: Sensors and Actuators, A: Physical, Vol. 104, No. 3, 15.05.2003, p. 263-267.

Research output: Contribution to journalArticle

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