Epitaxial growth of Si by ArF laser-excited supersonic free jets of Si 2H6

T. Motooka, H. Abe, P. Fons, T. Tokuyama

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Epitaxial growth of Si by ArF laser-excited supersonic free jets of Si 2H6'. Together they form a unique fingerprint.

Physics & Astronomy